Average Co-Inventor Count = 9.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Sony Corporation (1 from 58,130 patents)
2. Tokyo Electron Limited (1 from 10,326 patents)
1 patent:
1. 9362106 - Substrate processing method, substrate processing apparatus, and storage medium