Kabushiki Kaisha Toshiba

Tomoki Suetake

Hiroshi Nomura

Takuya Uehara

Itaru Chida

Hidekazu Sasaki

Keiichi Hirota

A laser irradiation apparatus of the embodiment includes: a laser light transmission mechanism to guide laser light from a laser light source and emit the laser light from a laser light emission part; a condensing mechanism to condense the laser light; a pipe state casing to house and hold the condensing mechanism inside thereof and have an opening part to irradiate the laser light; a fluid supply mechanism to supply a fluid into the casing to emit the fluid from the opening part; a positioning mechanism provided at the casing to keep a distance from the condensing mechanism to the processing object constant by being brought into contact with the processing object; and a fluid guide mechanism to guide the fluid emitted from the opening part to flow between the casing and the processing object along an axial direction of the casing.

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Kawasaki, Japan

Tomoki Suetake