Fujikin Inc.

Tohoku University

Tokyo Electron Limited

Tomokazu Imai

Tsutomu Shinohara

Nobukazu Ikeda

Kouji Nishino

Ryousuke Dohi

Masaaki Nagase

Kaoru Hirata

Katsuyuki Sugita

Takashi Hirose

Toshihide Yoshida

Hisashi Tanaka

Kazuyuki Miura

Tsuyoshi Shimazu

Shoichi Hino

Masahito Saito

Tadahiro Ohmi

Michio Yamaji

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP(where K is a proportionality constant) or as Qc=KP(P-P)(where K is a proportionality constant, m and n constants) by using orifice upstream side pressure Pand/or orifice downstream side pressure P. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

Flow rate range variable type flow rate control apparatus

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP(where K is a proportionality constant) or as Qc=KP(P&#x2212;P)(where K is a proportionality constant, m and n constants) by using orifice upstream side pressure Pand/or orifice downstream side pressure P. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.

Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed

Flow rate controller

Growing community of inventors

Osaka, Japan

Tomokazu Imai