Hamamatsu-photonics K.k.

Screen Holdings Co., Ltd.

Techno Ryowa Ltd.

Harada Corporation

Tomokatsu Sato

Masanori Suzuki

Akira Mizuno

Masahiro Miyagi

Hiroyuki Araki

Akio Sugita

Nobuo Kawase

Toshihiko Hino

Haruyuki Togari

A processing liquid supplying apparatus is arranged to discharge a processing liquid from a discharge port to supply the processing liquid to a processing object, and the processing liquid supplying apparatus includes a first piping, through the interior of which the processing liquid can flow, the interior of the first piping being in communication with the discharge port, and an X-ray irradiating means irradiating X-rays onto the processing liquid present inside the first piping. The first piping has an opening in its pipe wall and the opening is closed by a window member formed using a material that can transmit the X-rays, and the X-ray irradiating means irradiates the X-rays onto the processing liquid present inside the first piping via the window member.

Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method

The ionizer of the present invention comprises a chamber which has an ionization part that ionizes a portion of an ion carrier gas that is supplied to the interior of this chamber, and a blowing part which feeds the ion carrier gas toward a charged body. The ionization part is constructed from an ionization source which is contained in the chamber, and a control device which is connected with this ionization source via a high-voltage cable. Either the generating part of a soft X-ray generating device, the generating part of a low-energy electron beam generating device or the generating part of an ultraviolet radiation generating device is used as the ionization source. The control device, the connecting part between the control device and the high-voltage cable and the connecting part between the ionization source and the high-voltage cable are formed with an explosion-proof structure.

Ionized gas current emission type dust-free ionizer

Ionized air flow discharge type non-dusting ionizer

Growing community of inventors

Tokyo, Japan

Tomokatsu Sato