Mitsui Chemicals, Inc.

Yamagata University

Tomohito Sekine

Shizuo Tokito

Tadahiro Sunaga

Daisuke Kumaki

Jun Okabe

Kenjiro Fukuda

A light, flexible, and tough thin film having high total light transmittance that can be formed on various three dimensional shapes, and also provides a stably driven tactile sensor, which is an electronic device having the switching function thereof, is provided. The tactile sensor is formed on a polyimide thin film having high total light transmittance, thermal resistance, and a polar component of surface free energy with a specific value, and has a switching device that emits a voltage signal which, through an electronic circuit for controlling noise, stably drives another device. This tactile sensor has a curved or flat surface and has a first electrode, a ferroelectric layer, and a second electrode formed over the polyimide thin film. The switching device as a tactile sensor can drive another device merely by a light touch with a finger, and can be manufactured at a high non-defective rate.

Tactile sensor formed on polyimide thin film having high total light transmittance, and switching device using same

The metal thin film production method of the present invention includes, in the following order, the steps of: preparing a substrate () having thereon an underlayer () formed of an insulating resin; subjecting a surface of the underlayer () to a physical surface treatment for breaking bonds of organic molecules constituting the insulating resin; subjecting the substrate () to a heat treatment at a temperature of 200&#xb0; C. or lower; applying a metal nanoparticle ink to the underlayer (); and sintering metal nanoparticles contained in the metal nanoparticle ink at a temperature equal to or higher than a glass transition temperature of the underlayer (). A fused layer () having a thickness of 100 nm or less is formed between the underlayer () and a metal thin film () formed by sintering the metal nanoparticles.

Method for producing metal thin film and conductive structure

Growing community of inventors

Yamagata, Japan

Tomohito Sekine