Yokogawa Electric Corporation

Tomohito Nohno

Kodai Murayama

Toyoaki Hamaguchi

Soukichi Funazaki

A force detector includes a layered structure including a first layer and a second layer. The first layer includes a detection face that receives a force to be detected and the second layer is disposed on a face opposite to the detection face. A Young's modulus of the first layer is different from a Young's modulus of the second layer. The force detector further includes a stress generator formed in the layered structure and that receives the force acting in a tangential direction of the detection face and generates a stress with a distribution that is asymmetric with respect to a normal direction of the detection face around the stress generator. The force detector further includes a plurality of sensors disposed around the stress generator.

Force detector and force detection system with layered structure and stress generator

A polarization inspector for inspecting an inspection target, the polarization inspector having a polarization divider for spatially dividing at least a reflected beam of light from the inspection target by irradiating an illumination beam into divided beams of lights mutually different in polarization direction; one or more optical receivers for receiving the divided beams of lights and generating an image signal based on the divided beams of lights; and a processor for calculating at least one of an elliptical azimuth angle, a polarization degree and a polarization component intensity from the image signal.

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Tokyo, Japan

Tomohito Nohno