Denso Corporation

Yoshikawa Kogyo Co., Ltd.

Tomohito Kunda

Yasuki Shimoyama

Kenichi Ao

Seiichiro Ishio

Minoru Murata

Takashi Katsumata

Yoshifumi Murakami

Toshiya Ikezawa

Takeshi Shinoda

Norio Kitao

Tsukasa Fukurai

Osamu Ito

In a method for manufacturing an acceleration sensor device, a lid for covering an opening of a package body is prepared by stamping. The lid is plated and plating films are formed on surfaces of the lid. The burrs formed on the surfaces of the lid in the plating process are removed by chemical polishing. A semiconductor sensor chip is inserted in the package body through the opening and fixed. Then, the lid 70 is attached to the package body.

Method for manufacturing electronic device including package

A pressure sensor includes a hollow cylindrical stem, a sensor chip, and a wiring board. The hollow cylindrical stem has a pressure-sensitive flexible diaphragm at a first axial end thereof and an opening at a second axial end thereof, the opening for transmitting pressure into the stem. The sensor chip is provided on the diaphragm for outputting an electrical signal in proportion to the deformation of the diaphragm. The wiring board electrically connects the sensor chip to an external circuit. The wiring board is located around the sensor chip on the first axial end of the stem.

Pressure sensor

A physical quantity sensor detecting physical quantity, such as acceleration or angular velocity, is provided and mounted on, for example, a vehicle. The sensor has a physical quantity transducer and the first to third circuits. The transducer senses physical quantity acting in a direction determined with respect to a predetermined detection axis of the transducer to output a detection signal corresponding in level to the physical quantity. The first circuit receives the detection signal and output a first physical quantity signal depending in level on the detection signal. The second circuit produces a second physical quantity signal from the first physical quantity signal, the second physical quantity signal being larger in magnitude the first physical quantity signal. The third circuit receives the first and second physical quantity signals and outputs a signal consisting of the first and second physical quantity signals alternately selected and lined up sequentially in time.

Physical quantity sensor capable of outputting time-serial signal indicative of plural ranges of physical quantity

A capacitive-type acceleration sensor includes a sensor chip that forms a moving electrode and a fixed electrode. The electrodes face each other while maintaining a detection gap. The sensor chip is joined to a circuit chip integrally. The circuit chip is mounted on a package via a resin adhesive. The adhesive is mixed with a filler of a material having a Young's modulus higher than that of the resin.

Capacitive-type acceleration sensor

A semiconductor dynamic sensor such as an acceleration sensor is composed of a sensor chip having electrodes movable in response to acceleration applied thereto and a circuit chip having a circuit for processing signals fed from the sensor chip. The sensor chip and the circuit chip are contained and held in a packaging case. The sensor chip and the circuit chip are fixedly connected via an adhesive film. The sensor chip is correctly positioned on the circuit chip without creating misalignment relative to a sensing axis, because the adhesive film from which an adhesive material does not flow out under heat is used. A semiconductor wafer including plural sensor chips is first made and the adhesive film is stuck to one surface of the wafer, and then individual sensor chips are separated by dicing. The sensor chip is connected to the circuit chip via the adhesive film.

Semiconductor dynamic sensor

A semiconductor sensor chip is provided with a weight portion supported in a frame via beams whereby acceleration up to substantially &plusmn;1 G can be detected by utilizing piezoresistance effect of resistor elements formed on the beams. The semiconductor sensor chip is supported by a seat having a thermal expansion coefficient equivalent to that of the semiconductor sensor chip via the frame. The frame and the seat are adhered to each other by a flexible adhesive agent mixed with a plurality of resin beads functioning as spacers and under an adhesion state, air damping of the weight portion is carried out by setting a dimension of an air gap between the weight portion and the seat to a range of 7 through 15 &mgr;m.

Growing community of inventors

Okazaki, Japan

Tomohito Kunda