National Institute of Advanced Industrial Science and Technology

Fujikura Limited

Denki Kagaku Kogyo Kabushiki Kaisha

Tomohisa Katou

Yusuke Takeda

Hiroshi Murata

Ichirou Nagai

Hiroyuki Kamata

Tomonori Miura

A silicon carbide powder for the production of a silicon carbide single crystal has an average particle diameter of 100 &#x3bc;m or more and 700 &#x3bc;m or less and a specific surface area of 0.05 m/g or more and 0.30 m/g or less. A method for producing a silicon carbide powder for the production of the silicon carbide single crystal including sintering a silicon carbide powder having an average particle diameter of 20 &#x3bc;m or less under pressure of 70 MPa or less at a temperature of 1900&#xb0; C. or more and 2400&#xb0; C. or less and in a non-oxidizing atmosphere, thereby obtaining a sintered body having a density of 1.29 g/cmor more; adjusting particle size by means of pulverization of the sintered body; and removing impurities by means of an acid treatment.

Silicon carbide powder for producing silicon carbide single crystal and a method for producing the same

Provided is a manufacturing device of an aluminum nitride single crystal including a crucible. An aluminum nitride raw material and a seed crystal are stored in an inner portion of the crucible. The seed crystal is placed so as to face the aluminum nitride raw material. The crucible includes an inner crucible and an outer crucible. The inner crucible stores the aluminum nitride raw material and the seed crystal inside the inner crucible. The inner crucible is also corrosion resistant to a sublimation gas of the aluminum nitride raw material. The inner crucible includes either, a single body of a metal having an ion radius larger than an ion radius of an aluminum, or includes a nitride of the metal. The outer crucible includes a boron nitride. The outer crucible covers the inner crucible.

Apparatus for manufacturing aluminum nitride single crystal, method for manufacturing aluminum nitride single crystal, and aluminum nitride single crystal

Growing community of inventors

Tsukuba, Japan

Tomohisa Katou