Fujikin Inc.

Tokyo Electron Limited

Koganei Corporation

Fujikura Rubber Ltd.

Tomoegawa Co., Ltd.

Shoei Printing Co., Ltd.

Fujikin Incorporation

Tomoegawa Corporation

Tomohiro Nakata

Tsutomu Shinohara

Michio Yamaji

Kazunari Watanabe

Kenta Kondo

Takahiro Matsuda

Toshiyuki Inada

Kenji Aikawa

Akihiro Harada

Hidenobu Sato

Takeru Miura

Tadayuki Yakushijin

Kohei Shigyou

Toshihide Yoshida

Tsuyoshi Tanikawa

Nobuo Nakamura

Masahiko Takimoto

Masahiko Nakazawa

Tomoko Yuhara

Norihiko Amikura

Tsuneyuki Okabe

Shuji Moriya

Keisuke Ishibashi

Ryutaro Tanno

Satoshi Kagatsume

Takashi Funakoshi

Yukio Naito

Tatsuhiko Sato

Masahiko Satoh

Satoshi Muto

Yuya Suzuki

Yasumasa Yanagida

Kenichi Sato

Yuta Motegi

Akira Watanabe

Wataru Okase

Yohei Sawada

Takashi Ejiri

Ichiro Tokuda

Hideki Moriuchi

Hidenori Kiso

Taichi Kitano

Daihi Tsuchiguchi

Kengo Tsujino

Tomoki Nakada

Takahiro Kawano

Yuya Shindo

Masaya Aishima

Hiroto Shibata

Provided is a fluid control device that is compact and that enables data regarding an internal operation of the device to be acquired. A fluid control device V is disposed in a flow path of a fluid and enables data regarding an internal operation to be acquired, the fluid control device including a sensor hoodto which one or more sensors Mfor detecting an operation in the fluid control device are attached; a valve bodyconnected to the sensor hood; a diaphragmheld below the sensor hood, inside the valve body; a cover portionthat covers the outer periphery of the sensor hood; and a circuit boardthat is electrically connected to the sensor(s) and for which a thickness direction of the circuit board and a flow path direction are arranged in the same direction on the inside of the cover portion.

Fluid control device

A diaphragm includes: a metal thin plate; and a thin film layer formed over an entirety of a surface on one side of the thin plate.

Diaphragm, valve device, and method for manufacturing diaphragm

A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.

Flow-path forming block and fluid control device provided with flow-path forming block

A valve device comprising: a flow passage block in which a flow passage is formed; a diaphragm configured to open and close the flow passage; an actuator configured to push down the diaphragm via a diaphragm holder; a tubular bonnet formed with an internal thread on an inner circumferential surface, the bonnet being configured to join the flow passage block and the actuator; a tubular adjusting screw threaded to the internal thread, the adjusting screw being configured to come into contact with the diaphragm holder to adjust a valve opening position of the diaphragm; and an annular lock nut configured to lock the adjusting screw by being screwed into the internal thread.

Valve device, fluid control device, and manufacturing method of valve device

A fluid control device includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.

Fluid control device and manufacturing method for the fluid control device

A pipe joint includes first and second sleeves having fluid flow paths communicating with each other; an annular gasket interposed between abutting end surfaces of the sleeves; a male screw member having a through hole into which the first sleeve is inserted; and a female screw member having a through hole into which the second sleeve is inserted, the sleeves being joined by screwing the male screw member with the female screw member, wherein the pipe joint has a leak port opened at a portion of the outer peripheral surface of the male screw member not covered by the female screw member and communicates with a gap between the male screw member and the first sleeve to detect a leak fluid leaked from gaps between the sleeves and the gasket.

Pipe joint

An electromagnetic valve has an inlet port and an outlet port. The electromagnetic valve is configured to open and close a driving fluid passage communicating the inlet port and the outlet port. The electromagnetic valve includes: a housing; a solenoid that includes a bobbin having a coil wound therearound; a moving core that is provided on an axis of the bobbin and is disposed movably in an axial direction; a stationary core that is provided on the axis of the bobbin and is fixed in the housing; and a valve that is configured to be movable together with the moving core and opens and closes the driving fluid passage. The inlet port is opened on one surface side of the housing in the axial direction of the bobbin while the outlet port is opened on the other surface side of the housing in the axial direction of the bobbin.

Electromagnetic valve, valve device, fluid control device, and electromagnetic valve replacement method

A valve device includes: a body formed with a valve chamber, a first inflow passage, a second inflow passage, an outflow passage, and an annular groove and provided with a valve seat; and a diaphragm configured to communicate with and interrupt the second inflow passage and the outflow passage. An end portion of the second inflow passage is open to the valve chamber. The valve seat is provided on a peripheral edge of a location where the valve chamber and the second inflow passage communicate with each other. The annular groove is open to the valve chamber and is formed around the second inflow passage. An end portion of the outflow passage is open to the annular groove. The first inflow passage has a plurality of flow passages including an inflow port and a plurality of outflow ports, and each outflow port is open to the annular groove.

Valve device

A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

Valve device, flow rate control method, fluid control device, semiconductor manufacturing method, and semiconductor manufacturing apparatus using the valve device

A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.

Valve device, adjustment information generating method, flow rate adjusting method, fluid control system, flow rate control method, semiconductor manufacturing system and semiconductor manufacturing method

A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.

Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method

A valve body unit is configured to be disengaged from a stem by moving the stem and the valve body unit to a valve seat side in a state where a bonnet is separated from the valve seat, thereby pushing a replacement ring such that the replacement ring moves through the bonnet while decreasing in diameter and then drops down onto a ring dropping portion in the free state, then moving the stem, the valve body unit, and the replacement ring to an opposite side to the valve seat side such that a first surface comes into contact with a second surface and the ring dropping portion comes into contact with the replacement ring, and in this state, moving only the stem to the opposite side to the valve seat side such that the connection formed by a connecting mechanism between the stem connection portion and the stem is released.

Valve device, method for replacing valve body unit of valve device, and valve device assembly method

A resin card medium which has a substrate having electronic components mounted thereon and has sophisticated flatness and smoothness realized without providing any layer having holes for absorbing thicknesses of the electronic components; and a method for manufacturing a resin card medium. A resin card medium laminated body before pressing is prepared by laminating, on a first plastic finishing sheet, a substrate having one electronic component or two or more electronic components installed on one side of the substrate, with the one side, on which the electronic component or electronic components are installed, facing upward, and laminating, on the substrate, mixed paper constituted of plastic fibers and plant fibers, and by subjecting the resin card medium laminated body to hot pressing at a temperature which is a softening point or more of the plastic fibers and less than a melting point of the plastic fibers.

Resin card medium and manufacturing method therefor

A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.

Valve device, fluid control device and semiconductor manufacturing apparatus using the valve device

Growing community of inventors

Osaka, Japan

Tomohiro Nakata