Other

Tokyo Electron Limited

Toshiba Ceramics Co., Ltd.

Tomohiro Nagata

Takanori Saito

Tomio Konn

Ken Nakao

Eiichi Toya

Norihiko Saito

Sunao Seko

Toshiyuki Makiya

Hisaei Osanai

Kazutoshi Miura

Harunari Hasegawa

Hiroyuki Honma

Shigeru Yamamura

George Hoshi

Hideyuki Yokoyama

Akira Otsu

Katsutoshi Ishi

Hiroshi Mori

Masakazu Kobayashi

Katsutoshi Ishii

Takeshi Inaba

Masahiko Ichishima

Joji Hoshi

Kouji Teraoka

A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2&#xd7;10g/cmor less.

Carbon wire heating object sealing heater and fluid heating apparatus using the same heater

A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.

Heater sealed with carbon wire heating element

The fluid heating apparatus, in accordance with the present invention, developed to solve the technological problems described above is characterized by comprising at least a heating tube heating fluid to be supplied from fluid supply source, a heater section spirally formed on an outer periphery of the heating tube and a housing accommodating the heating tube and the heater section, wherein the heater section comprises a carbon wire heating element and a quartz glass tube in which the carbon wire heating element is enclosed.

Fluid heating apparatus

A rod-shaped heater provided is composed of a carbon wire heating element sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions and charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section having connection lines and for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

Heater

A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

Sealing terminal

A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.

Carbon heater

Growing community of inventors

Nishiokitama-gun, Japan

Tomohiro Nagata