Maruzen Petrochemical Company, Limited

Tomohiro Masukawa

Ryo Fujisawa

Shinji Sugihara

Kazuhiko Haba

Satoshi Kakuta

Masataka Nojima

A cross-linked polymer including a structure wherein at least a portion of phenolic hydroxyl groups in the polymer is protected by a group represented by the following formula (1): wherein Rrepresents an alkyl group having 1 to 5 carbons and n represents an integer from 1 to 5; and * represents a bond part of the phenolic hydroxyl group to a residue other than a hydrogen atom, and a structure wherein at least a portion of phenolic hydroxyl groups in the polymer is protected by a group represented by the following formula (2): wherein Rrepresents a divalent saturated hydrocarbon group having 2 to 17 carbons, containing an aromatic ring; and * represents a bond part of the phenolic hydroxyl group to a residue other than a hydrogen atom, and the polymers are cross-linked to each other.

Cross-linked polymer for resist

[Problem to be Solved] To Provide a method for producing an acid-decomposable polymer having a reduced metal ion content, which suppresses decomposition and deprotection of the acid-decomposable polymer. [Means to Solve the Problem] The method for producing an acid-decomposable polymer according to the present invention comprises the steps of:

Method for producing acid-decomposable polymer

Provided is a method for producing a polymer for an electronic material having a low content of metal ion impurities and a polymer for an electronic material obtained by such method. The method for producing a polymer for an electronic material according to the present invention comprises a polymerization step of obtaining a polymer by polymerizing a monomer(s) and a purification step of adding a strong acid having 0 or less pKa to the polymer solution and subsequently performing an ion exchange treatment to reduce the concentration of the metal ion impurities.

Method for producing polymer for electronic material and polymer for electronic material obtained by the production method

A method of producing a homopolymer or random copolymer of hydroxyl group-containing vinyl ether by polymerizing a monomer component comprising at least one hydroxyl group-containing vinyl ether using an oil-soluble radical polymerization initiator in the absence or presence of a solvent.

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Ichihara, Japan

Tomohiro Masukawa