Seiko Epson Corporation

Tomohiro Makigaki

Taro Takekoshi

Masahiro Fujii

Koji Kitahara

Shigeo Nojima

Kazuhiko Sato

Hiroyuki Maruyama

Hirokazu Ito

Seiichi Fujita

Hirokazu Itoh

Hiroshi Koeda

Toshio Arimura

A method for manufacturing a substrate conjugate is provided including a step of joining a first substrate including a first functional device to a second substrate including a second functional device and a step of providing a protective layer on at least one of: a face of the first substrate on which the first functional device is placed; and a face of the second substrate on which the second functional device is placed.

Method for manufacturing substrate conjugate, substrate conjugate, method for manufacturing electro-optical apparatus, and electro optical apparatus

An optical modulator is provided which can be manufactured by means of a simple process, and a display device, and a method of manufacturing same. The optical modulator comprises a first substrate having a movable reflective film that oscillates in accordance with the application of an electrostatic force; a light-transmitting second substrate disposed so as to oppose the first substrate and formed with a transparent electrode for applying the electrostatic force, in a position corresponding to the movable reflective film; and a cavity section, demarcated by the first substrate and the second substrate, for restricting the range of oscillation of the movable reflective film. By forming a movable reflective film by a portion of the substrate and determining the range of oscillation of the movable reflective film by the interval between the substrates, an optical modulator of high durability and high precision can be obtained.

Optical modulator, display device and manufacturing method for same

A silicon nozzle plate includes nozzles each with a first nozzle portion having a circular cross-section and a second nozzle portion having a circular cross-section wherein the circular cross-section of the first nozzle portion is smaller than the circular cross-section of the second nozzle portion. In one embodiment the nozzle plate is utilized in an inkjet head and includes a recess having a flat bottom surface that commonly communicates with a plurality of first nozzle portions and a through hole that exposes terminal portions that supply control signals to pressure generators.

Ejection device and inkjet head with silicon nozzle plate

A method for manufacturing an electrostatic actuator comprises a vibrating plate, an electrode plate facing the vibrating plate, and a vibrating chamber formed between the electrode plate and the vibrating plate, wherein the vibrating plate is displaced by electrostatic force, by applying voltage between the vibrating plate and the electrode plate, the method comprises: a process for forming a pressure compensating chamber communicating with the vibrating chamber; a process for forming a displacement plate at a portion of the pressure compensating chamber, displaceable according to external atmospheric pressure, into a warped form curved so as to protrude in a direction away from the facing inner wall of the pressure compensating chamber; and a process for shutting off and sealing the pressure compensating chamber from the external atmosphere, along with the vibrating chamber.

Method for manufacturing an electrostatic actuator

An electrostatic ink-jet head ( ) in which the present invention is applied comprises a pressure chamber ( ) communicating with an ink nozzle ( ), and an atmospheric pressure chamber ( ) opened to the atmosphere, with a vibrating plate ( ) being provided on the base plane of the pressure chamber ( ). Voltage applied between the vibrating plate ( ) and an electrode ( ) causes the vibrating plate ( ) to vibrate due to electrostatic force, thereby discharging ink droplets. A vibrating chamber ( ) communicates with a pressure compensating chamber ( ), and a displacement plate ( ) capable of being displaced in the direction outward from the plane according to fluctuations in the external, atmospheric pressure is formed at the base plane of the pressure compensating chamber ( ). Displacement of the displacement plate ( ) increases/decreases the volume of the pressure compensating chamber ( ), and the internal pressure of the vibrating chambers ( ) communicating thereof is adjusted to match the external atmospheric pressure. Accordingly, the vibration properties of the vibrating plate ( ) can be maintained constant even when the external atmospheric pressure fluctuates, and proper ink droplet discharging action can be maintained.

Electrostatic actuator, manufacturing method therefor, and liquid discharging device using the same

When a nozzle with a stepwise cross-section, which is provided with a small cross-sectional nozzle portion formed on the front side thereof and with a large cross-sectional nozzle portion formed on the rear side thereof in a discharge direction, respectively, is formed by applying etching to a silicon wafer for forming a nozzle plate , a resist film is formed on a surface of the silicon wafer , and patterning by half-etching and patterning by full-etching is applied to the resist film . Next, anisotropic-dry-etching is applied to the silicon wafer by ICP discharge, thereby forming grooves at the full-etched portions. Next, the resist film at the half-etched portions is removed and anisotropic-dry-etching is applied to the portions from which the resist film is removed by ICP discharge. As a result, there can be simply formed on a monocrystalline silicon substrate an ink nozzle having a stepwise cross-section and further having an action, which is larger than that of a conventional ink nozzle, for aligning the directions of pressures applied from cavities to nozzles in a nozzle axis direction.

Method of forming nozzle for injection device and method of manufacturing inkjet head

The present invention is applied to a device for radiating a light spot onto a predetermined location of a recording medium in order to optically record and/or reproduce information. The drive device may include a mobile body having a light-emitting element, an objective lens, a light-receiving element, and a holder for retaining the light-emitting element, the objective lens, and the light-receiving element. The drive device may also include a connecting device for electrically connecting the light-emitting element and the light-receiving element to an external electrical circuit.

Connector apparatus for electrically connecting an optical component

An optical pickup includes a movable unit supported in such a manner that the movable unit can move in tracking directions as well as in focusing directions. The movable unit has a laser unit including an objective lens, a reflecting mechanism, a light source, and a light detecting mechanism all constructed in an integral fashion. An axis of rotation of the movable unit intersects an optical axis of a light beam emitted by the laser unit. Also provided are two rotating mechanisms (for example, pivot pins or hinges) separately disposed in a direction along the axis of rotation, both rotating mechanisms having a common axis of rotation. Such an arrangement makes it possible to realize a small-sized, optical pickup having a driving mechanism suitable for high speed seeking. Such an optical pickup makes it possible to realize an optical recording/reproducing apparatus that can transfer data at a high rate of speed over a short access time.

Support structure for an optical pickup

The present invention is applied to a device for driving optical component parts, such as an objective lens, in accordance with displacement of a disk. A mobile body, on which the optical component parts are mounted, is supported by at least two plate springs that are not parallel with the disk, in such a manner that the mobile body can be driven in a focusing direction and a tracking direction. The plate springs can have an electric wiring function so that no wires extend from the mobile body.

Growing community of inventors

Azusagawa-mura, Japan

Tomohiro Makigaki