Sumitomo Heavy Industries, Ltd.

High Energy Accelerator Research Organization

Tomohiro Koyama

Tatsuo Koizumi

Teruo Takahashi

Makoto Ishikawa

Takayuki Tomaru

Rui Li

Tomiyoshi Haruyama

Takakazu Shintomi

Toshikazu Suzuki

A cryopump comprises a cryopanel that cools and thus condenses or adsorbs gas, and a pump housing that contains the cryopanel. a regeneration process of the cryopump includes a basic purge process, an evacuation processes, and an optional purge process that is executed additionally if required. The optional purge process includes one or more gas purge steps. In a cryopump control apparatus that controls the cryopump, a deterioration evaluation unit determines whether a re-purge number, which is the total number of gas purge steps that are required to be executed in one regeneration process, reaches a deterioration evaluation criteria number.

Cryopump control apparatus, cryopump system, and method for monitoring cryopump

A cryopump is provided with: a refrigerator that generates a cold state by a heat cycle in which an operating gas inhaled inside is expanded and discharged; a heat shield thermally connected to the refrigerator so as to be cooled to a target temperature; and a control unit that determines a command value for a heat cycle frequency such that a temperature of the heat shield follows the target temperature, and provides the command value to the refrigerator. The control unit estimates whether the refrigerator outputs a refrigerating capacity corresponding to the command value for the frequency based on a flow rate of the operating gas.

Cryopump and method for diagnosing the cryopump

A coreless and brushless direct-current motor includes an armature coil wound without core and formed in the shape of a saddle; an outside rotor magnet formed by a permanent magnet, the outside rotor magnet being provided at an outside of the armature coil in the shape of a cylinder so as to face the armature coil, the outside rotor magnet being rotated by the magnetic field; an inside rotor magnet formed by a permanent magnet, the inside rotor magnet being provided in the shape of a cylinder at an inside of the armature coil so that the inside rotor magnet has a pole opposite to the outside rotor magnet and a rotational shaft is independently provided; an output shaft connected to the inside rotor magnet; and a sealing part of a barrier structure which sealing part partitions the armature coil and the outside rotor magnet to an outside of the inside rotor magnet and seals the armature coil and the outside rotor magnet.

Coreless and brushless direct-current motor, Gifford McMahon (GM) cryogenic cooler, pulse tube cryogenic cooler, cryopump, magnetic resonance imaging (MRI) apparatus, superconducting magnet (SCM) apparatus, nuclear magnetic resonance (NMR) apparatus, and cryogenic cooler for cooling semiconductor

Coreless and brushless direct-current motor, Gifford McMahon (GM) cryogenic cooler, pulse tube cryogenic cooler, cryopump, Magnetic Resonance Imaging (MRI) apparatus, Superconducting Magnet (SCM) apparatus, Nuclear Magnetic Resonance (NMR) apparatus, and cryogenic cooler for cooling semiconductor

A cryogenic refrigerator includes a first refrigerant tube and a second refrigerant tube each comprising two tubes that are arranged on a cooling stage substantially parallel to each other and communicate with each other through a gas passage formed in the cooling stage. Phase differences are provided to oscillating gas pressures in the first and second refrigerant tubes, to cancel vibration of the cooling stage. Thus, the cryogenic refrigerator can be provided which can effectively reduce the vibration of the cooling stage caused by the oscillating gas pressure and can reduce the size thereof.

Cryogenic refrigerator

Growing community of inventors

Tokyo, Japan

Tomohiro Koyama