Tokyo Electron Limited

Toyota Jidosha Kabushiki Kaisha

Disco Corporation

Honda Motor Co., Ltd.

Stanley Electric Co., Ltd

Ihi Corporation

Tomohiro Kaneko

Akira Miyata

Daiki Yokoyama

Hiroshi Oyagi

Takeshi Matsumoto

Yoshihiro Sakayanagi

Masakazu Tabata

Hirotaka Saito

Midori Sugiyama

Yuki Takahashi

Takashi Koyama

Shigeki Nakayama

Masaki Ito

Yoshihisa Shinoda

Koji Ide

Yoshitaka Hara

Hisashi Ohki

Kenichirou Matsuyama

Keisuke Nagasaka

Kiyoshi Fujiwara

Yusuke Takasu

Nobutaka Fukunaga

Norihisa Arifuku

Shuhei Goto

Koki Hamada

Takashi Kawai

Akifumi Suzuki

Hiroyuki Kamata

Yuji Tsuchiya

Hideto Hanada

Yasushi Hayashida

Masayoshi Takori

Shigeki Sakakura

Ken Kuretake

Hiroshi Tsujii

Yusuke Takeuchi

Akihisa Yano

Shota Suzuki

Nobuyuki Honma

Takafumi Yamada

Masanori Sugiura

Hajime Shimizu

Masahiro Nagae

Miho Sasaki

Munehisa Kodama

Tatsuya Oka

Kouji Okamura

Yukiyoshi Saito

Kunitaka Masaki

Masamitsu Kimura

Rie Harada

Hiroyuki Tominaga

Syuzo Fujimaru

Seiji Ogura

Yuri Mitomo

Miyoko Nagaike

Tomonori Shin

Takahumi Yamada

Takashi Nishii

A thickness measuring device configured to measure a thickness of a substrate includes a substrate holder configured to hold the substrate; a measurer configured to measure the thickness of the substrate held by the substrate holder; and a moving mechanism configured to move the substrate holder and the measurer relatively in a horizontal direction. The substrate holder is provided with a notch portion which extends in a diametrical direction from a center of the substrate holder to an outer end thereof, and the measurer is configured to be relatively advanced into or retreated from the notch portion.

Thickness measuring device and thickness measuring method to measure thickness of substrate

A machine learning device includes a processor which performs, when performing learning of a model with image data, the learning of the model while excluding the image data of an animal having a feature amount common with a feature amount of a human.

Machine learning device and recording medium

A control device includes a processor that acquires travel data of a target vehicle, determines whether the target vehicle obeys a traffic rule, and adjusts a usage form of the travel data in a case of determining that the target vehicle does not obey the traffic rule.

Control device, recording medium, and data generation method

A substrate processing apparatusincludes a controllerconfigured to perform a first recipe and a second recipe in parallel. Each of the first recipe and the second recipe includes a first transfer processing of transferring a substrate from a transit unitto a liquid processing unit, a liquid processing, a second transfer processing of transferring the substrate from the liquid processing unitto a drying unitand a drying processing. The controllerdetermines, while the first recipe on a first substrate in substrates is being performed, when the second recipe on a second substrate in the substrates is started, a start timing of the first transfer processing of the second substrate such that a time period of the second transfer processing of the first substrate does not overlap with a time period of the second transfer processing of the second substrate.

Substrate processing apparatus and substrate processing method

A server prepares a charging plan for a travel route to a destination. The server obtains an outside air temperature and a battery temperature. The server reads a map from a storage, and calculates an amount of required heat required for increasing the battery temperature to a target temperature by collating the outside air temperature and the battery temperature with the map. The server prepares the charging plan such that an SOC of a battery at the time of arrival at the destination attains to a prescribed SOC and a sum of an amount of heat generation by charging of the battery at a charging point and an amount of heat generation by charging and discharging of the battery with travel of a vehicle is equal to the amount of required heat.

Plan preparation system and plan preparation apparatus

A substrate processing method of grinding a first substrate in a combined substrate in which the first substrate and a second substrate are bonded to each other includes measuring a total thickness distribution of the combined substrate; measuring a thickness distribution of the first substrate; calculating a thickness distribution of the second substrate by subtracting the thickness distribution of the first substrate from the total thickness distribution of the combined substrate; deciding a relative inclination between a substrate holder configured to hold the combined substrate and a grinder configured to grind the combined substrate, based on the thickness distribution of the second substrate; and grinding the first substrate while holding the combined substrate at the inclination which is decided.

Substrate processing method and substrate processing apparatus

A substrate processing method includes measuring a first thickness distribution of a first substrate in a first one of multiple combined substrates before being subjected to a finishing grinding; measuring a second thickness distribution of the first substrate in a second one of the multiple combined substrates before being subjected to the finishing grinding; deciding a relative inclination between a substrate holder configured to hold the second one of the multiple combined substrates and a grinder configured to perform the finishing grinding on the corresponding combined substrate, based on first difference data between the first thickness distribution and the second thickness distribution; and performing finishing grinding on the first substrate in the second one of the multiple combined substrates while holding the second one of the multiple combined substrates at the inclination which is decided.

A substrate processing apparatus includes a pair of first substrate chucks each configured to hold a substrate from below while allowing a first main surface of the substrate to face upwards; a pair of second substrate chucks each configured to hold the substrate from below while allowing a second main surface of the substrate opposite to the first main surface to face upwards; a rotary table which is configured to be rotated about a rotation axis; a first processing unit equipped with a first processing tool configured to process the first main surface of the substrate held by the first substrate chuck; and a second processing unit equipped with a second processing tool configured to process the second main surface of the substrate held by the second substrate chuck.

Substrate processing apparatus, substrate processing system and substrate processing method

A vehicle controller includes a processing unit which creates a power-supply plan that ensures a first amount of electric power needed for the vehicle to arrive at the destination from the current location along a travel route. The travel route includes a specified section on which wireless power-supply equipment, among a plurality of power-supply equipment, is disposed. Using weather information including the specified section, the processing unit creates the power-supply plan in which a ratio of a second amount of electric power, which is supplied from the at least one wireless power-supply equipment to the vehicle, to the first amount of electric power is less in a first case in which deposition is determined to be present on the specified section than in a second case in which deposition is determined to be not present on the at least one specified section.

Vehicle controller and vehicle control system

A vehicle information DB holds information on whether or not a vehicle falls under a welfare vehicle provided with an assistance apparatus for a driver who has a lower limb impairment. A power feed facility DB holds position information of a power feed facility and information indicating whether the power feed facility falls under a contact type power feed facility or a wireless power feed facility. A processing apparatus creates a travel route such that a larger number of wireless power feed facilities are included along the travel route when the vehicle falls under the welfare vehicle than when the vehicle does not fall under the welfare vehicle.

Control device of vehicle and vehicle control system

A setting method of a protective component includes a resin supply step of supplying a thermoplastic resin to a flat support surface of a support table, and a protective component forming step of shaping the thermoplastic resin into a sheet shape through pressing and spreading the thermoplastic resin along the support surface while heating and softening the thermoplastic resin to form a protective component of the thermoplastic resin in the sheet shape on the support surface. The setting method includes also a protective component bonding step of bringing a front surface that is one surface of the workpiece into tight contact with one surface of the protective component in the sheet shape and heating the protective component in tight contact to bond the protective component to the workpiece, and a post-bonding cooling step of cooling the protective component heated in the protective component bonding step.

Setting method of protective component and manufacturing method of protective component

A charging amount calculation apparatus calculates an amount of power consumption by a battery for running along a running route and a during-running charging amount received by a power reception apparatus from at least one second power feeding facility. The charging amount calculation apparatus calculates a pre-running charging amount based on the amount of power consumption and the during-running charging amount.

Charging amount calculation apparatus and charging system

The machine learning device comprises a training part configured to train a machine learning model used in a vehicle; and a detecting part configured to detect replacement of a vehicle part mounted in the vehicle. The training part is configured to retrain the machine learning model using training data sets corresponding to a vehicle part after replacement when a vehicle part relating to input data of the machine learning model is replaced.

Machine learning device

A notification device in a vehicle enables a person outside the vehicle to be notified of a predetermined operating state of the vehicle by the light emission, and includes: a plurality of spot-shaped light sources arranged at intervals to follow an upper edge of a windshield; a reflecting part reflecting light from the light sources to a front; an outer lens transmitting therethrough the light heading toward the front from the reflecting part; and a housing. The outer lens has on at least one of front and rear faces thereof a fine concave-convex face diffusing the light transmitted through the outer lens. Accordingly, the device is visible through an upper part of the windshield from a person outside the vehicle so that visibility is very good, and the light from the relatively small spot-shaped light source can be sufficiently diffused so that visibility can be further enhanced.

Notification device in vehicle

A substrate processing apparatus includes first processors, second processors, a transfer module and a controller. Each of the first processors is configured to perform a first processing on a substrate. Each of the second processors is configured to perform a second processing on the substrate on which the first processing is performed. The transfer module is configured to transfer the substrate to the first processors and the second processors. The controller is configured to control the first processors, the second processors and the transfer module. The controller controls a start timing for a first transfer processing of transferring the substrates to the first processor such that a timing of a second transfer processing of transferring the substrate having a liquid film formed thereon to the second processor from the first processor and a timing when another substrate is transferred by the transfer module are not overlapped with each other.

Growing community of inventors

Koshi, Japan

Tomohiro Kaneko