Other

Tomohiro Ishiguro

Hiroyuki Wada

Nobuhiko Umezu

Koichi Tatsuki

Hiroyuki Tamaki

Tadashi Hattori

Tetsuo Abe

Yoshiyuki Noguchi

Eiji Isomura

Akifumi Ooshima

Makoto Uragaki

Masataka Ebe

Yasuyuki Kato

A polysilicon film evaluation apparatus is provided which enables objective automatic evaluation of the status of a polysilicon film, as formed to a high accuracy in a contact-free fashion. To this end, there is provided a polysilicon film evaluation apparatus including a stage on which to set a substrate W carrying a polysilicon film, an optical system for observation with the visible light for illuminating the visible light on a substrate W on the stage to photograph a surface image of the polysilicon film on the substrate W to effect auto-focusing, an optical system for observation with UV light for illuminating the UV light on the substrate on the stage to acquire a surface image of the polysilicon film of the substrate, auto-focused using the optical system for observation with the visible light, and an evaluating unit for evaluating the linearity and periodicity of a spatial structure of the film surface of the polysilicon film, from a surface image of the polysilicon film obtained by the optical system for observation with UV light, to evaluate the status of the polysilicon film based on the results of evaluation of the linearity and periodicity.

Apparatus for evaluating polysilicon film

Growing community of inventors

Kanagawa, Japan

Tomohiro Ishiguro