Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Speedfam Co Ltd (1 from 57 patents)
1 patent:
1. 6638147 - Polishing method for removing corner material from a semi-conductor wafer