Ulvac, Inc.

Tomoharu Fujii

Isao Tada

Nobuhiro Hayashi

Tsuyoshi Yoshimoto

Atsushi Nakatsuka

Takayoshi Hirono

Kazuhiko Saito

Masayuki Iijima

Nobuaki Kakutani

Yixin Yang

Sadatsugu Wakamatsu

Naoki Sunagawa

Hiroyuki Hirano

Yoshiyuki Mitsuhashi

Togo Hosoya

Provided is a film-forming apparatus capable of cleaning a discharge apparatus under a state in which a film-forming space and a cleaning gas ambience are separated from each other while continuing to form a film on an object to be film-formed having a film-like shape. The film-forming apparatus includes a cleaning chamber configured to be connected to a film-forming space when a shutter is opened, and to be separated from the film-forming space and cause a cleaning gas to be discharged into an internal space when the shutter is closed; means for moving a discharge apparatus between a cleaning position inside the cleaning chamber and a film-forming position closer to a cylindrical member than the cleaning position; and a control apparatus that controls the discharge apparatus to discharge the raw material gas when the discharge apparatus is moved to the film-forming position, and controls the shutter to be closed so as to fill the cleaning chamber with the cleaning gas when the discharge apparatus is moved to the cleaning position.

Film-forming apparatus

[Object] To provide a roll-to-roll vacuum deposition apparatus capable of easily and speedily adjusting a pressing force between a printing roller and a backup roller. [Solving Means] In the present invention, by adjusting a pressing force between a printing roller and a backup roller through a relative movement of a mask forming unit including the printing roller and a transfer roller with respect to a vacuum chamber, individual adjustments of the printing roller and the transfer roller are eliminated and an adjustment of a pressing force on a unit basis is realized, thus achieving simplification of a structure, simplification and enhancement in precision of tasks, and a reduction in work time.

Roll-to-roll vacuum deposition apparatus

Growing community of inventors

Chigasaki, Japan

Tomoharu Fujii