Seiko Epson Corporation

Tomoaki Nakamura

Jiro Tsuruno

Kanechika Kiyose

Hiromu Miyazawa

Hiroshi Ito

Tsukasa Funasaka

Masayoshi Yamada

Tsutomu Nishiwaki

Hironori Suzuki

Hiroshi Matsuda

Hiroaki Hosomi

Yasushi Mizoguchi

Yasunori Onishi

Tomohide Onogi

Yasushi Matsuno

Tetsuya Isshiki

Kogo Endo

Kazuki Yoshida

Makoto Inoguchi

An optical filter includes a pair of reflection films facing each other via a gap, and a gap change portion that changes a distance between the pair of reflection films, wherein the reflection film is formed by a plurality of layered structures, the plurality of layered structures are respectively formed by alternate stacking of high-refractive layers and low-refractive layers having smaller refractive indices than the high-refractive layers and, in the respective layered structures, optical film thicknesses of the high-refractive layers and optical film thicknesses of the low-refractive layers are film thicknesses based on predetermined design center wavelengths set with respect to each of the layered structures, and the design center wavelengths are different with respect to each of the layered structures.

Optical filter and electronic apparatus

An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and blocks the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate. In the thickness direction of the substrate, a thickness dimension of the transmitting piezoelectric film is smaller than a thickness dimension of the receiving piezoelectric film.

Ultrasonic device, ultrasonic module, and ultrasonic measuring apparatus

A wavelength-tunable interference filter includes: a first substrate where a first mirror and a first electrode are provided; a second substrate where a second mirror corresponding to the first mirror and a second electrode facing the first electrode are provided; and a bonding part bonding the first substrate and the second substrate together. The first substrate includes a moving part where the first mirror is arranged, a diaphragm part holding the moving part in such a way that the moving part is movable in the Z-direction, and an outer circumferential part provided outside of the diaphragm part. The diaphragm part includes a planar part having a uniform thickness, and a first slope part having a thickness in the Z-direction incrementing as it goes from the planar part toward the outer circumferential part. The first electrode is provided over a range from the planar part to the first slope part. An outer edge of the first electrode, which is an edge opposite to the first mirror, is located at the first slope part. The bonding part is provided over a range from a part of the first slope part to the outer circumferential part.

Wavelength-tunable interference filter

An ultrasonic sensor includes a vibration plate, a first electrode, a piezoelectric body, and a second electrode. The first electrode is laminated on the vibration plate, that has a length along a surface of the vibration plate in a first direction, and that has a width Wbe along the surface of the vibration plate in a second direction that is orthogonal to the first direction. The width Wbe is not more than the length. The piezoelectric body is laminated on the first electrode and has a width Wpz in the second direction. The second electrode is laminated on the piezoelectric body. A ratio Wbe/Wpz between the width Wbe of the first electrode and the width Wpz of the piezoelectric body is not less than 0.1 and not more than 0.8.

Ultrasonic sensor as well as probe and electronic apparatus

An ultrasonic device includes: a substrate that is provided with a first surface and a second surface as a back surface of the first surface and has an opening opened from the first surface to the second surface; a support that blocks the opening on the first surface side; a vibrator provided on the support; and a metal membrane provided in an unopened region, which is not opened by the opening, on the second surface of the substrate.

Ultrasonic device, ultrasonic apparatus, and thickness design method

An ultrasonic device includes an ultrasonic transducer that has a vibration film and transmits an ultrasonic wave from a first surface side of the vibration film, an acoustic matching layer that is provided on the first surface side of the vibration film, and an acoustic lens that is provided on the acoustic matching layer on an opposite side to the vibration film, in which the acoustic matching layer is formed of even-numbered layers including a first layer and a second layer having acoustic impedance lower than acoustic impedance of each of the first layer and the acoustic lens, and the first layer and the second layer are disposed in this order toward the acoustic lens from the vibration film, and in which each of the first layer and the second layer has a thickness corresponding to an odd-numbered multiple of &#x3bb;/4 with a wavelength of the ultrasonic wave as &#x3bb;.

Ultrasonic device, ultrasonic module, and ultrasonic measurement apparatus

A piezoelectric device includes a piezoelectric film having a first surface in contact with a vibrating film and a second surface on the opposite side to the first surface, first and second electrodes that are provided on the second surface of the piezoelectric film and that are disposed at positions away from each other and are short-circuited to each other at a position away from the piezoelectric film, and a third electrode that is provided between the first and second electrodes on the second surface of the piezoelectric film and is disposed at a position away from the first and second electrodes. At least parts of the contours of end portions of the first and second electrodes are defined in parallel to side portions of the third electrode.

Piezoelectric device, probe, electronic apparatus, and ultrasonic imaging apparatus

An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and closes the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and that is sandwiched between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and that is sandwiched between a pair of electrodes in an intersecting direction intersecting with the thickness direction of the substrate.

Ultrasonic device, ultrasonic module, and ultrasonic measuring device

An ultrasonic device includes a substrate and a support member. The substrate has an element array including a plurality of ultrasonic transducer elements arranged in an array form. The support member has a surface adhered to the substrate in an area including the element array, and an opposite surface opposite from the surface adhered to the substrate, a distance from the surface adhered to the substrate to the opposite surface being different with respect to two adjacent ones of the ultrasonic transducer elements in the element array.

Ultrasonic device, probe, electronic equipment, and ultrasonic image device

A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.

Piezoelectric element, probe, and ultrasonic measurement apparatus

An ultrasonic transducer deviceincludes a substrate, an ultrasonic transducer element arraythat is provided on the substrateand in which a plurality of ultrasonic transducer elementsare arranged, and an identification ultrasonic transducer element arraythat is provided on the substrateand in which a plurality of identification ultrasonic transducer elementsare arranged. Identification information of the ultrasonic transducer deviceis set by some of the plurality of identification ultrasonic transducer elementsbeing set to a receivable state and the rest being set to a non-receivable state.

Ultrasonic transducer device and ultrasonic measurement device

A piezoelectric element includes a vibrating film, a piezoelectric body, a first electrode, a second electrode, and a groove. The piezoelectric body is arranged upon the vibrating film. The first electrode is arranged upon the piezoelectric body. The second electrode is arranged upon the piezoelectric body and at a position that is separated from the first electrode. The groove is located between the first electrode and the second electrode and splits a surface of the piezoelectric body in two, as seen in plan view from a thickness direction of the vibrating film.

Piezoelectric element, piezoelectric device, probe, electronic machine, and ultrasonic image apparatus

An ultrasonic transducer element chip includes a substrate defining an opening, an ultrasonic transducer element disposed at a position corresponding to the opening in a thickness direction of the substrate, and a reinforcing member connected to the substrate to cover the opening. The reinforcing member defines a ventilation passage from the opening to an outside of the substrate.

Ultrasonic transducer element chip, probe, electronic instrument, and ultrasonic diagnostic device

A stress-detecting element includes a support body, a support film, a first piezoelectric element, first and second elastic parts. The support body has an opening part with first and second rectilinear sections extending parallel to each other. The support film blocks off the opening part. The first piezoelectric element straddles the first rectilinear section from an interior area to an exterior area of the opening part as seen in plan view. The first elastic part straddles the first rectilinear section from the interior area to the exterior area of the opening part. The second elastic part straddles the second rectilinear section from the interior area to the exterior area of the opening part. The first and second elastic parts respectively have first and second elastic end sections disposed in the interior area of the opening part and spaced apart from each other.

Growing community of inventors

Nagano, Japan

Tomoaki Nakamura