Phoenix Electric Co., Ltd.

Tomihiko Ikeda

Atsuji Nakagawa

Hiroshi Takahashi

Toshitaka Fujii

Tetsuya Gouda

Shinichi Ushijima

Andrei Kazmierski

Tetsuya Shirai

Tomohiko Inoue

Kenichi Yamashita

Kouichi Odani

Kana Watanabe

Hiromu Matsumoto

Tatsuo Yamamoto

Toshitaka Hujii

Hisao Hurukawa

Hiroki Takahashi

Kei Shimada

A light irradiation device for an exposure apparatus allowing implementation of photo-alignment process with a simple configuration is provided. The light irradiation device is configured using a light source with a plurality of LEDs, and a polarizing element that receives light from the light source and applies the light transmitted through the polarizing element to a workpiece. An optical axis of each of the LEDs is set in such a manner as to have a first angle θto the workpiece. A second angle θas an angle half of a light distribution angle of the light emitted from each of the LEDs is set smaller than the first angle θ

Light irradiation device, and exposure apparatus provided therewith

It is intended to provide an irradiation device that can achieve good starting performance even without encapsulating a starting performance promoting substance into the internal space of a luminous tube in a discharge lamp, and simultaneously, can distinguish whether the discharge lamp is a genuine product or not. An irradiation device () is composed of a discharge lamp () provided as a light source and an ultraviolet light source () irradiating ultraviolet light to the discharge lamp () to detect whether the discharge lamp () is a genuine product or not in activation of the discharge lamp ().

Light source device including discharge lamp, irradiation device and distinguishing method for discharge lamp

Reflector for lamp

Electrode for discharge lamp

A light source is composed of a discharge lamp, a resistor and a reflector container. The discharge lamp is provided as a source of light. The resistor increases a resistance in elevation of a temperature thereof, and reduces the resistance in lowering of the temperature thereof. The reflector container is a constituent element to which the discharge lamp and the resistor are attached. Additionally, the resistor is caused to heat an outer surface of the reflector container in accordance with elevation of a temperature of the discharge lamp in activation of lighting of the discharge lamp.

Light source, lighting device and method of lighting the same

The present high-pressure discharge lamp is composed of an arc tube part having an internal space, a pair of tungsten electrodes disposed in opposition to each other within the internal space, and mercury and halogen encapsulated in the internal space. The halogen is excessively encapsulated into the internal space relatively to the capacity of the internal space so as to establish an appropriate halogen cycle when the mercury partially deposits without evaporating.

High pressure discharge lamp and lighting method thereof

A high pressure discharge lamp with auxiliary lamp comprises: a high pressure discharge lamp having an arc tube and at least one sealing portion, a pair of main electrodes, and a pair of feeders supplying power to the main electrodes; an auxiliary lamp having an airtight case, an inner electrode, and an outer electrode, wherein the inner electrode is arranged at a position so as to part the inner space to large and small spaces, the outer electrode is arranged at a position so as to face the large space, the auxiliary lamp as arranged as the large space faces the sealing portion.

High pressure discharge lamp with auxiliary lamp

The light emitting device comprises: a bowl-shaped reflector; a point light source; and a combined lens provided on the light axis of the point light source. And the combined lens has: a convex lens part having a focal point coinciding with the point light source, refracting center light around the light axis into parallel light; and a concave lens part provided around the convex lens part, and refracting and diffusing light having an angle with the light axis larger than an angle between the center light and the light axis so as to increase the angle with the light axis. A virtual focal point of the light refracted and diffused with the concave lens part coincides with the focal point of the paraboloid of revolution.

Light emitting device

The light emitting device comprises a point light source, a solid and transparent light guide, a recess arranged on center of a light receiving surface of the light guide, a concave lens formed on a surface of the recess. A reflecting side surface is a revolving surface determined by revolving a parabola passing through one point of peripheral border of the light receiving surface and the other point of peripheral border of the light radiating surface, and having a focal point on the other point of peripheral border. The point light source is arranged apart from the light receiving surface so as to divide the light from the point light source into light entering into the light guide through the surface of the recess and light entering into the light guide through some part of the light receiving surface other than the recess.

The high-pressure discharge lamp includes: a pre-seal glass inserted in the internal space of each of seal portions and integrally comprising a metal foil sheathing portion which sheathes a metal foil, an electrode sheathing portion which sheathes a portion of an electrode that extends from a first end of the metal foil toward a base portion and an external lead pin sheathing portion which sheathes a portion of an external lead pin that extends outwardly from the other end of the metal foil; and a conductor for generating discharge between the conductor and the metal foil. The electrode sheathing portion is fused to the base portion. The external lead pin sheathing portion has an outer surface hermetically fused to an inner surface of one of the seal portions. A clearance hermetically sealed between the pre-seal glass and the seal portion encapsulates inert gas therein.

High-pressure discharge lamp and light sources device using the same

There is provided a novel method of lighting an ultra-high pressure discharge lamp (A ) having a discharge bulb ( ) made of quartz glass in which a pair of electrodes ( ) and ( ) are disposed facing each other, the method including: lighting the lamp with alternating current; and providing a time period of at least one second for which the alternating current assumes a lighting frequency of 5 Hz or lower during a period for which the lamp lights, wherein the electrodes ( ) and ( ) each have a current withstanding capability against a current 1.5 times or more as high as a current value at which the lamp lights stably. This method enables the ultra-high pressure discharge lamp to have a longer life and exhibit a higher luminance.

ULTRA-HIGH PRESSURE DISCHARGE LAMP LIGHTING METHOD, ULTRA-HIGH PRESSURE DISCHARGE LAMP TO WHICH THE METHOD IS APPLICABLE AND BALLAST FOR USE THEREIN, AND LIGHTING SYSTEM INCORPORATING THE LAMP AND THE BALLAST

A metal halide lamp includes a pair of electrodes with a spacing of 0.5 to 1.5 mm therebetween, an envelope enclosing the pair of electrodes, and at least one metal halide, other than a mercury halide, that is encapsulated in the envelope in an amount of from 0.04 to 0.3 mg/cc, wherein the metal halide lamp operates in a power range from 75 to 270 watts per millimeter across the spacing between the pair of electrodes.

Growing community of inventors

Himeji, Japan

Tomihiko Ikeda