Lam Research Corporation

Tom Trinh

Chung-Ho Huang

Henry T Chan

Bostjan Pust

Behzad Lajevardi

Willie Ku

A software emulation system for a gas delivery system of a substrate processing system includes an input/output bus and an emulator bus. An input/output bus adapter includes a switch configured to route data packets from a system controller for the substrate processing system to one of the input/output bus and the emulator bus. A gas delivery system emulator in communication with the emulator bus is configured to receive the data packets from the input/output bus adapter via the emulator bus and perform software-based emulation of a plurality of hardware components of the gas delivery system that are interconnected. The plurality of hardware components are modelled using one or more software models and include a gas source and at least one of a valve and a mass flow controller.

Software emulator for hardware components in a gas delivery system of substrate processing system

A network interface controller for a communication network of a substrate processing system includes a data collection module configured to monitor a communication bus to retrieve and store data frames transmitted between components of the substrate processing system. A user interface is configured to receive inputs for configuring extraction of data from the data frames. A data processing module is configured to store, based on a network configuration file, a map correlating data within the data frames to of the components of the substrate processing system, extract data from the data frames in accordance with the inputs received by the user interface and the map, and provide, to the user interface, the data as extracted from the data frames. The user interface is further configured to display the data as extracted from the data frames in accordance with the inputs received by the user interface.

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Dublin, CA, United States of America

Tom Trinh