Imec Vzw

Universiteit Gent

Tom Sterken

Geert Van Steenberge

Philip Ekkels

Phillip Ekkels

A method for accurately positioning a component on a receiver substrate is provided. The component is transferred from a donor substrate to a receiver substrate facing the donor substrate. The method comprises creating at least one nozzle at a predefined location in the area of contact between a blister forming layer on the donor substrate, and a component attached to the donor substrate by adhesion to the blister forming layer. The blister forming layer comprises at least a dynamic release layer, consisting of a dynamic release material. The application of the laser beam creates a blister that contains vaporized dynamic release material. The blister expands until a nozzle is created, the nozzle allowing the vaporized dynamic release material to exit the blister and cause the release of the component and its propulsion towards the receiver substrate. The nozzle releases the material in the form of a narrow jet of gas.

Method for positioning components on a substrate and substrates suitable for the method

A method for bonding thin chips to a target substrate is described herein. According to an example method, an adhesive tape is provided with thinned chips attached thereto. The chips are transferred to a carrier substrate by one or more tape-to-tape transfer steps. The carrier is then diced into separate carrier-and-chip assemblies, which can be handled by existing tools designed for handling chips of regular thickness. The fact that the thinning step is separate from the carrier attachment may lead to reduced thickness variation of the chips. The use of tape-to-tape transfer steps allows for attaching either the front or the back side of the chips to the carrier. The use of an individual carrier per chip allows for treating the thinned chip as if it were a standard chip.

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Merelbeke, Belgium

Tom Sterken