Applied Materials, Inc.

Tom Osterheld

Boris Fishkin

Kyle A Brown

Victor Belitsky

Ginetto Addiego

Boris Fuksshimov

Daniel F Kennedy

Jeff Beeler

Sen-Hou Ko

Doyle Edward Bennett

The present invention provides a method and apparatus for delivering one or more rinse agents to a surface, such as a polishing pad surface and preferably one or more polishing fluids. The invention also provides a method of cleaning one or more surfaces, such as a polishing pad surface and a substrate surface, by delivering a spray of one or more rinse agents to the surface and, preferably, causing the rinse agent to flow across the surface from a central region to an outer region where unwanted debris and material is collected.

Combined slurry dispenser and rinse arm

Combined slurry dispenser and rinse arm and method of operation

A polishing pad for a chemical mechanical polishing apparatus. The polishing pad includes a plurality of concentric circular grooves uniformly spaced over the polishing surface of the polishing pad.

Polishing pad having a grooved pattern for use in a chemical mechanical

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Mountain View, CA, United States of America

Tom Osterheld