Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Smt Gmbh (1 from 1,409 patents)
1 patent:
1. 11631168 - Method, computer program and apparatus for determining a quality of a mask of a photolithography apparatus