Molecular Imprints, Inc.

Canon Kabushiki Kaisha

Canon Nanotechnologies, Inc.

Tom H Rafferty

Byung-Jin Choi

Philip D Schumaker

Pawan Kumar Nimmakayala

Daniel Babbs

Van Nguyen Truskett

Alireza Aghili

Matthew C Traub

Ahmed M Hussein

Yeshwanth Srinivasan

Whitney Longsine

Some devices, systems, and methods obtain one or more images of a substrate, wherein the substrate includes a feature pattern; determine one or more edges of the feature pattern based on the one or more images; determine an offset of the feature pattern relative to the substrate and an angle of the feature pattern relative to the substrate based on the one or more edges of the feature pattern; and generate a transformation for a drop pattern based on the offset of the feature pattern and on the angle of the feature pattern.

Devices, systems, and methods for the transformation and cropping of drop patterns

A method of separating a template from a cured layer on a substrate. Including, sending instructions to move the template away from the cured layer at a first rate, at a second point in time. Including, receiving a first data set as a function of time starting after the second point in time. Including, fitting a model of the first data set to a database of historical data sets. Including, identifying a target data set in the historical data sets based on results of the fit of the model of the first data set and information in the target data set. Including, sending instructions to move the template away from the substrate at a second rate at a third point in time after the second point in time based on the identified target data set.

Method of separating a template from a shaped film on a substrate

Methods and systems for dispensing fluid in imprint lithography, including selecting drop patterns, each associated with different target locations on a substrate and a selected volume for each drop of each drop pattern; selecting a plurality of subsets of nozzles of a dispenser, each subset configured to dispense drops corresponding to each drop pattern; for each drop pattern: dispensing the drops corresponding to the drop pattern from each subset of nozzles; obtaining an image of the drops from each subset of nozzles; and processing the image from each subset of nozzles to determine a positional error of the drops with respect to the target locations and a volumetric error of the drops with respect to the selected volume for each drop; and adjusting, based on the positional error and the volumetric error of the drops from each subset of nozzles for each drop pattern, dispense parameters of the dispenser.

Drop placement evaluation

The present invention features a method to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The method includes sensing relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.

Interferometric analysis method for the manufacture of nano-scale devices

An imprint lithography system operable for imprinting a pattern into a material deposited between an imprint mold and a substrate, the system including, inter alia, a first set of imaging units positioned at a first angle relative to normal of the substrate; and a second set of imaging units positioned at a second angle relative to normal of the substrate, wherein the first and second angles are not equal to each other.

Enhanced multi channel alignment

The present invention features a system to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The system senses relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.

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Austin, TX, United States of America

Tom H Rafferty