Applied Materials, Inc.

Tom Chi

Shantha Mohan

Charles Q Huang

Parris Hawkins

Badri N Krishnamurthy

Pradeep M Kulkarni

John F Arackaparambil

Prakash M Kulkarni

Billy Chow

Wen Fong Lin

Bishnu Nandy

Patrick M D'Souza

Huey-Shin Yuan

Jett Jensen

The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle () having lifecycle activities for SW developing and integrating (), installing and administrating (), factory modeling (), manufacturing planning (), manufacturing controlling, monitoring and tracking () and analyzing of manufacturing results (). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

Computer integrated manufacturing techniques

The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle () having lifecycle activities for SW developing and integrating (), installing and administrating (), factory modeling (), manufacturing planning (), manufacturing controlling, monitoring and tracking () and analyzing of manufacturing results (). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and software building blocks. The framework components are adapted for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

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San Jose, CA, United States of America

Tom Chi