Picosun Oy

Tom Blomberg

Juhana Kostamo

Marko Pudas

Niku Oksala

Väinö Kilpi

Timo Vähä-Ojala

Timo Vaha-Ojala

A substrate processing apparatus (), comprising a reaction chamber () having an upper portion () and a lower portion () sealing an inner volume of the reaction chamber () for substrate processing, the lower portion () being movable apart from the upper portion () to form a substrate loading gap therebetween, a substrate support system comprising a support table () and at least one support element () vertically movable in relation to the support table () and extending through the support table () to receive a substrate within the reaction chamber (), and a stopper () stopping a downward movement of the at least one support element () at a substrate loading level.

Substrate processing apparatus and method

Precursor container, comprising a first volume formed by a first chamber to house precursor material, a second volume formed by a second chamber and separated from the first volume by a partition wall, and a conduit passing through the partition wall and extending from the first volume to the second volume providing the precursor material housed within the first volume with a route to the second volume following a pressure increase in the first volume. The partition wall is a gas-permeable wall allowing gas from the first volume to permeate to the second volume.

Precursor container

A thin-film deposition apparatus, related systems and methods are provided. The thin-film deposition apparatuscomprises a reaction chamberfor accommodating substratesarranged with their side faces adjacent to each other and a fluid distribution devicewith an expansion regioninto which precursor fluid(s) enter via a number of inlets, and a transition regionfor mixing said fluids. From the transition region, fluidic flow is directed into the reaction chamberto propagate between the substratesin a strictly laminar manner. By the invention, uniformity of precursor distribution on the substrates can be markedly improved.

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Espoo, Finland

Tom Blomberg