Kyocera Corporation

Tokuichi Yamaji

Shigeo Tanahashi

Shinichi Abe

Katsuhiro Kaneko

Masaru Nagata

Yuriko Ueno

A sensor includes a weight body, a frame which is located so as to surround the weight body when viewed from above, a beam part which is provided with flexibility and in which a first end is connected to the weight body and a second end is connected to the frame, and a detection part which is provided on the beam part and detects deformation of the beam part as an electric signal. The beam part includes a main part in which a cross-sectional shape in a direction perpendicular to a longitudinal direction connecting the first end and the second end is a rectangular shape, and an extending part which protrudes from at least one of an upper surface or a lower surface of the main part and extends in the longitudinal direction or extends in a width direction perpendicular to the longitudinal direction when viewed from above.

Sensor for detecting angular velocity

An object of the invention is to provide an optical integrated circuit substrate capable of establishing optical connection between an optical waveguide and a semiconductor light-receiving element with high light-receiving efficiency and of achieving low-loss light transmission. In the optical integrated circuit substrate, on a substrate is formed an optical waveguide having a clad and a core layer. Embedded in the optical waveguide are a metal placement portion for an optical element and a thin-film optical element placed thereon. Distance between the thin-film optical element and the core layer is reduced. In a region free of the thin-film optical element, there is an adequate distance between the core layer and the substrate. This allows satisfactory optical connection between the thin-film optical element and the optical waveguide. In the thin-film optical element-free region, low-loss light transmission is achieved without interaction between transmitted light and the substrate.

Optical integrated circuit substrate and optical module

A prior-art electronic circuit component comprising an insulating film and a circuit conductive layer made of a superconducting metal suffers low reliability resulting from insufficient adhesion between these layers. An electronic circuit component of the invention comprises an insulating film made of a high polymer material having a dielectric constant of 2.5 or less, a base metal layer formed of copper on the insulating film, having a thickness of 0.01 to 0.3 .mu.m, and a circuit conductive layer formed of at least one of niobium and niobium nitride on the base metal layer. The electronic circuit component of the invention can accomplish an increased adhesion between the insulating film and the circuit conductive layer. Furthermore, by sequentially forming, on the circuit conductive layer, a conductive-layer coating metal layer made of at least one of aluminum and copper, the insulating film, the base metal layer and the circuit conductive layer, there can be obtained a multi-layered circuit substrate with a superconducting circuit of high density and high-level function.

Growing community of inventors

Kyoto, Japan

Tokuichi Yamaji