Mitsui Petrochemical Industries, Ltd.

Tokinori Agou

Masahide Tanaka

Tomoaki Shimoda

Takeshi Sakashita

Masaaki Kawasaki

Hitomi Matsuzaki

Masaru Sudo

Masahiro Kuwabara

Hiroaki Nakagawa

Shuji Minami

Masaru Sudou

Takami Nishikawa

Masahiro Kuwahara

Takamasa Tsumoto

A high light-transmissive dust-proof body equipped with a holding frame to be mounted on a mask substrate and a transparent light-transmissive film mounted on the holding frame, wherein the light-transmissive film comprises an inorganic film having a thickness of 0.2 .mu.m to less than 10 .mu.m and transmitting light having wavelengths of 240 to 500 nm at an average light transmittance of at least 85%, wherein the light-transmissive film forms (i) a three-layer structure of a low refractive index layer/high refractive index layer/base layer, or (ii) a five-layer structure comprising a low refractive index layer/high refractive index layer/base layer/high refractive index layer/low refractive index layer, the high refractive index layer being an inorganic layer and the low refractive index layer being an organic polymer.

High light-transmissive dust-proof body and method of preparing same

The novel fluorine-containing mono- or poly-alkylene glycol of this invention is a mono- or poly-alkylene glycol of the formula (I): ##STR1## wherein R.sup.1, R.sup.2 and R.sup.3 independently represent a hydrogen atom or an alkyl group having 1 to 30 carbon atoms, A represents a hydrogen atom, an unsaturated hydrocarbon group having 1 to 30 carbon atoms, a polar group or a polar group substituted with an unsaturated hydrocarbon group having 1 to 100 carbon atoms, B represents the same as the group selected from the group of A, provided that both A and B are not hydrogen atom, or a hydrocarbon group having 1 to 30 carbon atoms which may contain an oxygen atom or fluorine atom, x represents an integer of 0 to 100, and n represents an integer of 1 to 1000, the mono- or poly-oxyalkylene group in the main chain of the mono- or poly-alkylene glycol having at least one fluorine-substituted hydrocarbon group with 2 to 30 carbon atoms having at least 3 fluorine atoms bonded thereto graft-bonded onto the mono- or poly-oxyalkylene group in the main chain of the mono- or poly-alkylene glycol per one molecule of the mono- or poly-alkylene glycol.

Fluorine-containing mono- or poly-alkylene glycol and method for

A reflection-preventive layer composed of a specific polyfluoro(meth)acrylate is formed on one or both of the surfaces of a transparent film of a cellulose derivative. In this reflection-preventive pellicle film, the minimum light transmission in wavelengths of 350 to 450 nm is improved and the average light transmission is improved, and the adhesion of the reflection-preventive layer to the cellulose derivative layer is excellent.

Reflection-preventive pellicle film and process for preparation thereof

Hydrophilic gelled crosslinked polymers comprising as an essential constituent monomer component a (meth)acrylate ester monomer having a fluorine-substituted hydrocarbon group containing at least three fluorine atoms grafted thereto. The fluorine-containing polymers have excellent oxygen permeability, water swellability, wearing comfort and contamination resistance.

Oxygen-permeable article of fluorinated hydrocarbon group-grafted

Reflection-preventive pellicle film

Fluorine-substituted hydrocarbon group grafted (meth)acrylate polymers

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Yamaguchi, Japan

Tokinori Agou