Sumitomo Precision Products Co., Ltd.

Tokiko Misaki

Ryohei Uchino

Osamu Torayashiki

A mirror device includes a mirror, an actuator tilting the mirror, a first hinge coupling the mirror to the actuator, a base, a second hinge coupling the mirror to the base, a movable comb electrode coupled to the mirror, and a fixed comb electrode fixed to the base. The actuator is controlled based on a capacitance between the movable comb electrode and the fixed comb electrode. The movable comb electrode is disposed on a portion of the mirror closer to the second hinge than to the first hinge.

Mirror device including actuator controlled based on capacitance

A portion of an SiOlayeron a peripheral portionof an actuator body portionis left on the surface of the actuator body portionwhen it is etched so as to extend over the outside of the piezoelectric elementWhen the third resist maskcovering the actuator body portionand the mirror portionis formed and etching is performed, the third resist maskhas a first slitand a second slitthe second slitexposing a peripheral portionof a mirror portionand the first slitsexposing a peripheral portionof the actuator body portionand a portion of the SiOlayeron the actuator body portionand having a width wider than the second slit

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Hyogo, Japan

Tokiko Misaki