Other

Shin-etsu Quartz Products Co., Ltd.

Heraeus Quarzglas Gmbh & Co Kg

Tohru Segawa

Kyoichi Inaki

Nobumasa Yoshida

Naoki Hayashi

Akira Fujinoki

Tatsuhiro Sato

Toshiyuki Kato

Mamoru Endo

Hiroyuki Kimura

Naoto Watanabe

Takahiro Kaitou

First of all, there is provided a production process of a synthetic quartz glass which has less impurity, has a high-temperature viscosity characteristic equal to or more than that of a natural quartz glass, and hardly deforms even in a high-temperature environment, and especially a production process of a highly heat resistant synthetic quartz glass which is free from the generation of bubbles and is dense. Secondly, there is provided a highly heat resistant synthetic quartz glass body which is easily obtained by the production process of the present invention, and especially a transparent or black quartz glass body which is free from the generation of bubbles, is dense, has high infrared absorption rate and emission rate, and has an extremely high effect for preventing diffusion of alkali metal. The process is a process of producing a highly heat resistant quartz glass body having an absorption coefficient at 245 nm of 0.05 cmor more, and the silica porous body was subjected to a reduction treatment, followed by baking, thereby forming a dense glass body.

Production process of synthetic quartz glass

An object of the present invention is to provide a quartz glass jig, which, when employed in a processing apparatus using plasma, is less in generation of abnormal etching and particles and low in contamination with impurities. This object is obtained by a quartz glass jig for a processing apparatus using plasma, wherein a surface of the jig is subjected to grinding or a sandblast processing and has a surface roughness Rin the range of from 2 &#x3bc;m to 0.05 &#x3bc;m, and microcracks of grinding marks formed during the grinding or sandblast processing have a depth of 50 &#x3bc;m or less.

Quartz glass jig for processing apparatus using plasma

Plasma resistant quartz glass jig

Method of producing cristobalite containing silica glass

Growing community of inventors

Koriyama, Japan

Tohru Segawa