Murata Manufacturing Co., Ltd.

Murata Mfg. Co., Ltd.

Tohru Kasanami

Takeshi Nakamura

Hiroji Tani

Keiichi Okano

Atsuo Senda

Yoshiko Morishita

Takuji Nakagawa

Tsutomu Yokoi

Kazuto Miyagawa

Teppei Kubota

Shigeki Fujiwara

Toshimi Kaneko

Mitsuro Hamuro

Shizuharu Watanabe

Norio Fukui

Keizou Yamamoto

Tetsuya Murakawa

Toshio Ogawa

Naoto Kimura

Satoshi Shindo

Toshiaki Ikeda

Shigeo Nakatsuji

Yoshiki Morishita

Hirozi Tani

A vibrating gyroscope includes a vibrating body and at least one driving member located on the vibrating body. The at least one driving member is arranged vibrate the vibrating body in a direction that is substantially perpendicular to an axis of the vibrating body. At least two detection members are are arranged so as to be spaced from each other and operatively connected to the vibrating body. The at least two detection members are located on opposite sides of a plane which includes the axis and a vibrating direction of the vibrating body such that the at least two detection members detect vibration of the vibrating body at substantially the same amount and detect at a different amount a Coriolis force generated by a rotational angular velocity applied to the vibrating body.. A differential amplifier circuit is connected to the at least two detection members and is arranged receive signals from the at least two detection members and outputs a signal indicative of the Coriolis force by canceling detection signals received from the vibration body at the least two detection members.

Vibrator and vibratory gyroscope using the same

A method of forming a vibrating gyroscope includes the steps of providing a vibrating body and disposing at least one driving member on the vibrating body so that the at least one driving member is arranged to generate vibration in the vibrating body in a vibrating direction that is substantially perpendicular to an axis of the vibrating body. Then, at least two detection members are disposed on the vibrating body such that the at least two detection members are spaced from each other, located on opposite sides of a plane including the axis and the vibrating direction of the vibrating body, arranged to detect a rotational angular velocity applied to the vibrating body and arranged in a non-parallel relationship relative to each other and in a non-parallel relationship relative to the at least one driving member.

Vibrator including piezoelectric electrodes of detectors arranged to be

A vibrating gyroscope comprising includes a vibrating body. At least one driving member is located on the vibrating body and vibrates the vibrating body in a vibrating direction that is substantially perpendicular to an axis of said vibrating body. At least two detection members are located so as to be spaced from each other on the vibrating body and located on opposite sides of a plane including the axis and the vibrating direction of the vibrating body. The at least one driving member is arranged in a non-parallel relationship relative to each of the at least two detection members. The at least two detection members are arranged to detect a rotational angular velocity applied to the vibrating body and the at least two detection members are arranged in a non-parallel relationship relative to each other.

Vibratory gyroscope including piezoelectric electrodes or detectors

The vibrator includes, for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.

Vibrator including piezoelectric electrodes or detectors arranged to be

In order to improve uniformity of temperature distribution, despite heat which is generated in a resistance circuit and flows into a support part thereby causing a high output, a resistance circuit is provided with first, second and third regions having different resistance values so that the third region which is in proximity to the support part has the highest resistance value.

Resistance temperature sensor

The vibrator includes for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.

Vibrator and vibrating gyroscope using the same

A ferroelectric thin film element 1 constructed by forming a MgO thin film 3 oriented in the direction (100), a lower electrode 4 composed of an alloy thin film of a Ni--Cr--Al system oriented in the direction (100), a ferroelectric thin film 5 composed of a PbTiO.sub.3 thin film oriented in the direction (111), and an upper electrode 6 in this order on a substrate composed of (100) silicon 2.

Ferroelectric thin film element

Vibratory gyroscope

A platinum temperature sensor includes a meandering pattern portion and outlet portions continuously connected to respective ends thereof which are defined by a platinum film which is formed on an insulating substrate. External electrodes are formed to cover the outlet portions as well as the ends of the insulating substrate provided with the outlet portions. Each of the external electrodes comprises a first layer containing platinum or nickel which is in contact with the outlet portion and with the insulating substrate, a second layer containing silver and platinum which is formed on the first layer, a third layer containing nickel which is formed on the second layer, and a fourth layer containing tin or solder which is formed on the third layer. The first layer suppresses diffusion of silver contained in the second layer, and the third layer improves heat resistance of the second layer, while the fourth layer improves solderability.

Platinum temperature sensor

A temperature sensor includes a ceramic layered product having a multilayer structure formed of a plurality of ceramic sheets, a plurality of resistive patterns, containing copper or nickel, formed on major surfaces of the plurality of ceramic sheets respectively, a conductive path passing through the ceramic sheets for series-connecting the plurality of resistive patterns with each other, and respective terminals connected to both ends of the series-connected plurality of resistive patterns. The ceramic sheets being formed of an unreducible ceramic material prepared from a TiO.sub.2.BaO.CaO.ZrO.sub.2 compound.

Temperature sensor

A temperature sensor includes a ceramic layered product having a multilayer structure formed of a plurality of ceramic sheets containing an unreducible ceramic material, a plurality of resistive patterns, containing copper or nickel, formed on major surfaces of the plurality of ceramic sheets respectively, a conductive path passing through the ceramic sheets for series-connecting the plurality of resistive patterns with each other, and respective terminals connected to both ends of the series-connected plurality of resistive patterns.

A resistance film of platinum is formed on an insulating substrate of alumina. The resistance film is divided by grooves passing therethrough to provide a zigzag resistance circuit pattern, and the film forms a pair of terminal electrodes electrically connected to end portions of the resistance circuit pattern, respectively. In order to stop transmission of heat generated in the resistance circuit pattern to the terminal electrodes, gaps for stopping heat conduction are formed between the resistance circuit pattern and each of the terminal electrodes.

A screen printing method comprises an aligning process for fixing a master plate (10) to a fixing frame (20) in aligned relation thereto, an exposure process of exposing a screen printing plate (50) through the master plate (10) fixed to the fixing frame (20), a developing process for developing the thus exposed screen printing plate (50), and a printing process for printing a workpiece (80) by using the thus developed screen printing plate (50). In the aligning process, the positioning pins (22a, 22b, 22c) of the fixing frame (20) abut against the positioning protuberances (62a, 62b, 62c) of a fixing block (61). In the exposure process, the positioning pins (22a, 22b, 22c) of the fixing frame (20) abut against the positioning protuberances (32a, 32b, 32c) of a positioning block (3), while the positioning pins (52a, 52b, 52c) of the printing plate (51) holding the screen printing plate (50) abut against the positioning protuberances (62a, 62b, 62c) of the fixing block (61). In the printing process, the positioning pins (52a, 52b, 52c) of the plate frame (51) holding the screen printing plate (50) abut against the positioning protuberances (72a, 72b, 72c) of a fixing block (71). With this arrangement, the aligned state established by the aligning process which is performed first of all is maintained throughout until the last printing process is completed.

Growing community of inventors

Kyoto, Japan

Tohru Kasanami