Fab Solutions, Inc.

Tohoru Tsujide

Keizo Yamada

A semiconductor manufacturing apparatus, which performs predetermined processing for a group of wafers supplied by a preprocessor that performs preliminary processing, comprises a data storage unit for storing wafer processing history data received from the pre-processor, a target value storage unit for storing a processing target value for the semiconductor manufacturing apparatus, an identification unit for identifying a wafer supplied by the pre-processor, a processor for employing the wafer processing history data and the processing target value to determine processing conditions for the wafer identified by the identification unit, a conveying unit for transporting the wafer from the identification unit to a wafer processor, a controller for controlling the wafer processor in accordance with the wafer processing conditions instructed by the processor, and a determination unit for examining the condition of the wafer that has been processed by the wafer processor to determine whether the wafer is good or bad, wherein, in accordance with the results obtained by the determination unit, the processor determines whether the processing of the wafer is to again be performed by the wafer processor, and as necessary, again sets the processing conditions.

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Tokyo, Japan

Tohoru Tsujide