Corning Incorporated

Todd Robert McMichael

Robert Dennis Grejda

Keith Ernest Hanford

Brian Monroe McMaster

Kevin John Magierski

Paul John Shustack

Paul Francis Michaloski

Paul Gerard Dewa

Jack Weston Frankovich

Michael Morgan Dunn

Mark Ranney Westcott

Glenn A Parker

Justin Paul Gales

An alignment apparatus for aligning components of an optical assembly include a chuck configured to support the optical assembly thereon, and an adjustable flexure assembly disposed around the chuck. The adjustable flexure assembly includes a plurality of flexures. The plurality of flexures are positioned relative to the chuck such that each of the plurality of flexures contact the optical assembly when the optical assembly is positioned on the chuck. Adjustment of a position of one or more flexures of the plurality of flexures adjusts an alignment of an optical axis of an optical component of the optical assembly when the optical assembly is positioned on the chuck, wherein the alignment apparatus is configured to align optical axes of the optical component to an angle of deviation of less than about 1,000 μrad and provide an extinction ratio within the optical assembly of greater than or equal to 1000:1.

Optical assemblies and apparatuses and methods for aligning components of optical assemblies

A compound lens assembly and method for making a compound lens assembly useful for deep ultraviolet lithography are described. The compound lens assembly includes a first lens component having an optical surface bonded to an optical surface of a second lens component. The bonding at the interface can be achieved using a hydroxide catalysis bonding technique. The compound lens assembly and process for making same solve problems relating to constringence and/or inherent birefringence known for conventional optical elements used in deep ultraviolet lithography or inspection of wafers or reticles in the DUV.

Hydroxide-catalysis bonding of optical components used in DUV optical systems

An assembly for fixing an optical element in a manner that decouples the optical element from mechanical stresses and thermal strains while providing freedom to facilitate alignment of the optical element, and while also eliminating polymers that can cause contamination problems including a mount configured for attachment to an optical system; a plurality of flexible members each having a first end affixed to or integrally extending from the mount, and a free end defining a bearing surface for supporting an optical element; and a polymer free bonding agent forming a hydroxide-catalyzed bond joining a surface of the optical member to the bearing surface. The optical element may be aligned with the flexible members without resting on the flexible members.

Polymer-free compliant optical member support

A compound optical assembly is constructed from a plurality of stacking elements for spacing, aligning, and retaining optical elements within the assembly. Stacking faces of the stacking elements are measured and low-order surface errors are extracted, represented by mathematical approximations having a primary angular frequency. The stacking elements including the optic holders are relatively oriented to promote complementarity between the low-order surface errors of mating stacking faces.

Method of minimizing stacking element distortions in optical assemblies

An optical device includes a support structure configured to retain an optical element using a cured adhesive composition that is disposed between a surface of the support structure and a surface of the optical element, wherein a structured optical particulate material is dispersed throughout the cured adhesive. The structured optical particulate material redirects curing radiation via a scattering mechanism to facilitate curing of portions of the adhesive compositions that cannot be directly exposed to the radiation, thereby facilitating rapid and more thorough curing than could otherwise be achieved without the structured optical particulate material.

Adhesive with embedded waveguides for curing

An optical system includes a lens assembly and a light source. The lens assembly includes an optical lens positioned to transmit and refract light provided by the light source, and a lens holder coupled to the optical lens and maintaining a position of the optical lens relative to the light source. The optical lens is coupled to the lens holder with a bonding agent arranged in an interrupted configuration at positions proximate to a circumference of the optical lens. The light source provides light to the optical lens of the lens assembly that has an optical footprint that includes a plurality of high-intensity regions separated from one another by low-intensity regions and the bonding agent is positioned in a circumferential orientation relative to the light source such that the bonding agent is spaced apart from the high-intensity regions of the optical footprint of the light.

Optical systems exhibiting improved lifetime using beam shaping techniques

An optical element mount has an inner member suspended within an outer member by a number of flexures. A first translational actuator is movable within the outer member and coupled to the inner member by a first shaft and is actuable to translate the inner member along a first substantially linear travel path within a translation plane that is orthogonal to an optical axis. A second translational actuator is movable within the outer member and coupled to the inner member by a second shaft and is actuable to translate the inner member along a second substantially linear travel path within the translation plane. A rotational actuator is movable within the outer member and coupled to the inner member by a third shaft and actuable to rotate the inner member about an instant point of rotation that is defined at the intersection of the first and second linear travel paths.

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Rochester, NY, United States of America

Todd Robert McMichael