Xsilogy Inc.

Seacoast Science, Inc.

Todd Mlsna

Sanjay V Patel

David R Baselt

Bernd Fruhberger

Erno Klaassen

Robert J Warmack

Stephen Terrence Hobson

Jonathan Day Lucas

Manna Leon Warburton

Erno Klaasen

Apparatus, systems and methods are described for preconcentrators, chemical sensing systems and gas chromatographs. A preconcentrator is described that comprises a hollow enclosure containing a sorbent material. The enclosure may be a capillary tube that can be formed in to a desired shape and that may be heated. Heating may be accomplished by passing an electrical current through the capillary or other hollow enclosure form. The sorbent material can be a liquid, a solid, a porous ceramic material and/or a chemiselective polymer. The sorbent material can be coated to the inner wall of the enclosure. The hollow enclosure may be maintained in an insulated chamber. The preconcentrator acts to concentrate a vapor passed through the preconcentrator to a chemical sensing array that can detect chemicals present in the vapor. A gas passed through the hollow enclosure can provide a chemically concentrated input to a chromatographic column.

Preconcentrators and methods of making and using the same

The present invention relates to the field of chemical detection. More specifically, the invention provides devices that can detect various target analytes (e.g., chemicals and/or biological materials) present in an environment by adsorption or absorption of the target analyte(s) to or in a chemical sensing material such that an electrical parameter (e.g., capacitance, resistance, etc.) of the chemical sensing material is altered in a manner detectable by circuitry associated with the sensing electrode pair coated with the chemical sensing material. Here, the sensing electrode pair(s) of the devices of the invention are suspended over an inert substrate via one or more posts used to space the electrodes from the substrate.

Interdigitated chemical sensors, and methods of making and using the same

A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment, the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Fixed parallel plate MEMS capacitor microsensor array

A fixed parallel plate micro-mechanical systems (MEMS) based sensor is fabricated to allow a dissolved dielectric to flow through a porous top plate, coming to rest on a bottom plate. A post-deposition bake ensures further purity and uniformity of the dielectric layer. In one embodiment the dielectric is a polymer. In one embodiment, a support layer is deposited onto the top plate for strengthening the sensor. In another embodiment, the bottom plate is dual-layered for a narrowed gap. Integrated circuit arrays of such sensors can be made, having multiple devices separated from each other by a physical barrier, such as a polycrystalline containment rim or trough, for preventing polymer material from one sensor from interfering with that of another.

Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays

A sensor for determining the presence of an analyte is disclosed comprising a reactive layer disposed between a base plate and a movable plate. The reactive layer is configured to interact with an analyte effecting a change in capacitance between the base plate and movable plate. When the analyte has a polarity or overall Hildebrand solubility parameter that is similar to the reactive layer, the change in capacitance is caused by a swelling of the reactive layer as analyte is absorbed into the reactive layer. This results in a decrease in capacitance. When the analyte has a solubility parameter not near the reactive layer, the absorbed analyte causes the reactive layer's total polarity to increase, an effect that dominates swelling. This causes an increase in capacitance. A capacitive sensing circuit is included for measuring the change in capacitance which is indicative of the analyte exposed to the sensor.

Growing community of inventors

Carlsbad, CA, United States of America

Todd Mlsna