Applied Materials, Inc.

Todd MacEachern

Jeffrey E Krampert

Kevin T Ryan

Joseph Dzengeleski

An ion source chamber with an embedded heater is disclosed. The heater comprises a radiant heater, such as a heat lamp or light emitting diodes, and is disposed within the ion source chamber. The radiant heat from the heater warms the interior surfaces of the ion source chamber. Further, the ion source chamber is designed such that the plasma is generated in a portion of the ion source chamber that does not contain the heater. Additionally, a controller may be in communication with the heater so as to maintain the ion source chamber at a desired temperature when a plasma is not being generated in the ion source chamber.

Growing community of inventors

Gloucester, MA, United States of America

Todd MacEachern