Entegris, Inc.

Fluoroware, Inc.

Todd M Ulschmid

Dennis J Krampotich

Gregory W Bores

David L Nyseth

John A Leys

Steven P Kolbow

Carlos Cadavid

Steven A Fischer

Steve A Fischer

A front-opening wafer transport module has a container portion with transparent shell and a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the container portion for supporting wafers. Additionally, the side walls of the shell have recessed portions with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to lock into place in the recesses on the side walls of the carrier. Attachment of the handles to the side walls is accomplished without breaks between the interior and exterior of the module and without separate fastners.

Transport module

In one embodiment, a sight tube flowmeter is formed of a plurality of fluoropolymer components welded together to form a unitary flowmeter body. The components can comprise a PFA upright sight tube having two end portions, a flow conduit extending therethrough and two fitting portions that are uniquely welded onto each end of the sight tube, and a fluoropolymer float device movable to various positions within the flow conduit depending on the flow level of the fluid flowing therethrough. The float device can be of conventional design or for those flowmeter embodiments where low fluid flow rates are to be measured, an elongate float can be utilized. The floats and, in particular, a designated portion thereof, are visible through the sight tube to provide visual indication of the position, and thus the flow rate of fluid flowing through the flowmeter. In addition, alternative embodiments include the implementation of the unique sight tube and elongate float design in conventional flowmeters.

Fluoropolymer flowmeter

A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that a non-interrupted path-to-ground extends from each wafer support shelf to the machine interface. Additionally, the side walls of the shell have a recess portion with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to rotatably lock such handles into place on the side walls of the carrier.

Growing community of inventors

New Prague, MN, United States of America

Todd M Ulschmid