Asml Holding N.v.

Todd Bednarek

Stephen Roux

Daniel Nicholas Galburt

A trajectory planning process receives data generated by high-level control software. This data defines positions and scan velocities. The trajectory planning process creates sequences of constant acceleration intervals that allow critical motions to be executed at maximum throughput. The trajectory planning process outputs a profile. A profile executor, using the profile output by the trajectory planner process, generates continuous synchronized, filtered, multi-axis position and acceleration commands that drive control servos. Time intervals generated by the trajectory planner are quantized to be integer multiples of a real time clock period. The trajectory planner outputs have infinite jerk, but are smoothed by filters in the profile executor to both limit jerk and minimize servo-tracking errors. The trajectory planner allows time for the profile executor filters, but does not restrict fine tuning of the shape of these filters, provided that the width of the tuned filter does not exceed the allowed time.

Method and system for improved trajectory planning and execution

A first set of interferometric measuring beams is used to determine a location of a patterned surface of a reticle and a reticle focus plane for a reticle that is back clamped to a reticle stage. A second set of interferometric measuring beams is used to determine a map of locations of the reticle stage during scanning in a Y direction. The two sets of interferometric measuring beams are correlated to relate the reticle focal plane to the map of the reticle stage. The information is used to control the reticle stage during exposure of a pattern on the patterned surface of the reticle onto a wafer.

Reticle focus measurement system using multiple interferometric beams

Reticle focus measurement method using multiple interferometric beams

A method, system, and computer program product for non-real-time trajectory planning and real-time trajectory execution. A trajectory planning process receives data generated by high-level control software. This data defines positions and scan velocities, where multiple axis motion must be precisely synchronized. The trajectory planning process creates sequences of constant acceleration intervals that allow critical motions to be executed at maximum throughput. The output of a trajectory planning process is known as a profile. A profile executor, using the profile output by the trajectory planner process, generates continuous, synchronized, filtered, multi-axis position and acceleration commands (i.e., execution data) that drive control servos. Time intervals generated by the trajectory planner are quantized to be integer multiples of a real time clock period. The trajectory planner outputs have infinite jerk, but are smoothed by filters in the profile executor to both limit jerk and minimize servo-tracking errors. The trajectory planner allows time for the profile executor filters, but does not restrict fine tuning of the shape of these filters, provided that the width of the tuned filter does not exceed the allowed time.

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Southbury, CT, United States of America

Todd Bednarek