The University of North Carolina at Chapel Hill

Kobel Steel USA, Inc.

Tobin L Munsat

Brian Rhys Stoner

William McClure Hooke

Roy E Fauber

Steven P Bozeman

Sean Washburn

A plasma system is disclosed comprising a vessel suitable for containing a plasma at a pressure of at least about 100 mtorr, a plasma gas in the vessel at a pressure of at least 100 mtorr, an antenna with a substantially planar face positioned adjacent a portion of the vessel for applying an electromagnetic field to the plasma gas to thereby generate and maintain a plasma, and means for applying an external magnetic field to the plasma gas other than the field generated by the antenna, and having a component in a direction substantially perpendicular to the planar face of the antenna.

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Princeton, NJ, United States of America

Tobin L Munsat