Pfeiffer Vacuum Gmbh

Agilent Technologies, Inc.

Pleiffer Vacuum Gmbh

Pfeiffer Vacuum Technology Ag

Tobias Stoll

Michael Schweighoefer

James L Bertsch

Jan Hofmann

Sebastian Oberbeck

Robert Watz

Mirko Mekota

Michael Schill

Christopher-Mark Rippl

Wolfgang Losch

Martin Eilers

Florian Schneider

Jan Hoffmann

Thorsten Burggraf

Andreas Rippl

Dirk Hopf

Timo Birkenstock

Aleksandr Shirinov

Bernd Hofmann

Frank Klabunde

Sönke Gilbrich

Florian Bader

Thilo Wille

Daniel Sieben

Sebastian SÜDWASSER

Jürgen Jung

L James Bertsch

Viktor Dorscht

Christian Koch

Jürgen Wagner

Herbert Stammler

Jan Dipl Phys Hofmann

Jürgen Keller

Michael Schweighöfer

Bernd Koci

Bernhard Koch

Adrian Wirth

Pascal Wielsch

Robert Walz

Jochen BÖTTCHER

Jochen Böttcher

Gernot Bernhardt

Martin Lohse

Maximilian Birkenfeld

Michael SCHWEIGHÖFER

Marco Antonacci

Johannes Schnarr

Peter Vorwerk

The invention relates to a vacuum system, comprising a vacuum pump, preferably turbomolecular pump, and at least one vacuum chamber, wherein the vacuum pump comprises: at least a first and a second inlet and a common outlet; at least a first and a second pumping stage, each pumping stage comprising at least one rotor element being arranged on a common rotor shaft, wherein the first inlet is connected to an upstream end of the first pumping stage and the second inlet is connected to an upstream end of the second pumping stage; a direction element for preventing a gas flow from a downstream end of the first pumping stage to the second inlet; a conduit having a conduit inlet and a conduit outlet, wherein the conduit inlet is connected to the downstream end of the first pumping stage and the conduit outlet is connected to a location downstream of the second pumping stage; wherein the first inlet and the second inlet of the pump are connected to the same vacuum chamber.

Vacuum system with a multi-stage and multi-inlet vacuum pump with a directional element separating pump stages

A vacuum pump includes at least one vacuum port for releasably connecting the vacuum pump with at least one recipient an elastomeric seal for sealing the vacuum port against atmosphere a diaphragm gland provided on a vacuum side of the vacuum port and at least one of at least one suction channel and at least one suction opening provided between the elastomeric seal and the diaphragm gland.

Vacuum system

The invention relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, which includes a rotor member which forms the pump-active surface of the molecular pump stage and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the rotor elements of the side channel pump stage are supported by the rotor member of the molecular pump stage. The invention further relates to a vacuum pump having at least one molecular pump stage, in particular a Holweck stage, and having at least one side channel pump stage which is arranged downstream of the molecular pump stage and which includes a plurality of rotor elements, wherein the side channel pump stage is arranged between a pump inlet and the molecular pump stage.

Vacuum pump

A vacuum pump that includes a housing, a control unit including control elements for controlling electronic and electrical components located in the inner chamber of the housing, and a separation member for separating the inner chamber in which an underpressure prevails, from an environment in which the vacuum pump is located and including a printed circuit board having elements for conducting electrical current and voltage in the inner chamber of the pump housing.

Vacuum pump with control unit

A foil shield for covering at least one opening of a suction flange of a vacuum pump includes at least one member formed of a material having a relative permeability &#x3bc;greater than 1,000.

Foil shield for a vacuum pump with a high-speed rotor

An arrangement for supporting a shaft of a vacuum pump includes a first bearing for supporting the shaft at one of its end, a second bearing for supporting the shaft at another of its ends and formed as a rolling bearing, a holder for receiving the second bearing and including an oscillating base, a fixation member secured in the vacuum pump housing, metallic connection members for connecting the oscillating base with the fixation member and axial springs arranged between the oscillating base and the fixation member and providing for the axial stiffness of the holder which is greater than its radial stiffness thereof and greater than the axial stiffness of the first bearing.

Arrangement for supporting a shaft of a vacuum pump and a vacuum pump with such an arrangement

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Hohenahr, Germany

Tobias Stoll