Helmholtz-zentrum Dresden-rossendorf E.v.

Tobias Kosub

Denys Makarov

A method for continuously determining all of the components of the resistance tensor of thin films, such as thin film resistors and thin film sensors of all types, is disclosed. A continuous determination of all the components of the resistance tensor is facilitated without switching the contact points using a minimum number of contacts. A homogeneous thin film part of any shape is provided with a least three contact points arranged at distances from one another. An input voltage is applied at each of the contact points, the current flowing through the contact points are detected, and the complete resistance tensor of the thin film part is determined from the voltage and current values.

Method for continuously determining all of the components of the resistance tensor of thin films

The invention relates to a measuring apparatus for characterizing the electrical resistance of a measurement object, comprising an electric energy source having two poles, a voltage measuring device having two measuring inputs, four connecting contacts for the connection of four contact electrodes, and a switching device for the variable electrical pairwise connection of each one of the poles and measuring inputs to each one of the connecting contacts, forming different wiring configurations, wherein the measuring device is configured to carry out at least two measuring sequences with different wiring configurations and to determine the series resistance of the measurement object by incorporating the current and voltage signals acquired in these wiring configurations.

Growing community of inventors

Dresden, Germany

Tobias Kosub