Average Co-Inventor Count = 4.21
ph-index = 9
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (31 from 13,520 patents)
2. National Semiconductor Corporation (1 from 4,789 patents)
3. Ii-vi Incorporated (1 from 71 patents)
33 patents:
1. 12431339 - Adjustable de-chucking voltage
2. 12288675 - Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide
3. 12146219 - Flow control features of CVD chambers
4. 12009228 - Low temperature chuck for plasma processing systems
5. 11972930 - Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide
6. 11728139 - Process chamber for cyclic and selective material removal and etching
7. 11594428 - Low temperature chuck for plasma processing systems
8. 11476093 - Plasma etching systems and methods with secondary plasma injection
9. 11361941 - Methods and apparatus for processing a substrate
10. 11264213 - Chemical control features in wafer process equipment
11. 11195699 - Generalized cylindrical cavity system for microwave rotation and impedance shifting by irises in a power-supplying waveguide
12. 11004661 - Process chamber for cyclic and selective material removal and etching
13. 10903052 - Systems and methods for radial and azimuthal control of plasma uniformity
14. 10755900 - Multi-layer plasma erosion protection for chamber components
15. 10559451 - Apparatus with concentric pumping for multiple pressure regimes