Globalfoundries Singapore Pte. Ltd.

Ting Yang

Jie Zeng

Kyong Jin Hwang

Disclosed is a semiconductor structure including a device (e.g., a bi-directional semiconductor-controlled rectifier, such as a bi-directional silicon-controlled rectifier (BDSCR)) and, within the device, at least two dual-level isolation structures. Each dual-level isolation structure includes a first section at the top surface of the semiconductor substrate and one or more second sections extending through the first section deeper into the semiconductor substrate. The dual-level isolation structures are positioned within the device so as to increase well resistance. By increasing well resistance, the trigger voltage of the device can be reduced without increasing device size. Also disclosed is a method of forming dual-level isolation structures within such a device.

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Singapore, Singapore

Ting Yang