Vanguard International Semiconductor Corporation

Industrial Technology Research Institute

Ting Chou

Chao-Ming Koh

Chuen-Nan Chen

Shin-Chi Lee

Ching-Cherng Rou

Yung-Song Lou

Ping-Wei Wang

Hsing Chen

Angela Yc Lee

Pie-Yu Jeang

Spring Yeh

A method for preparing small area parallel lapping specimens by a focused ion beam technique is disclosed in which a multiple-staged ion beam milling process is used to prepare a specimen for microscopic examination. The method may be carried out by first providing a high current ion beam for removal of a top surface of a specimen exposing a surface that immediately covers the characteristic feature to be examined to define a small window area that contains the characteristic feature. The present invention novel method may further be combined with a wet etching step after the ion beam milling process is completed. In the wet etching step, a three dimensional surface containing the characteristic feature to be examined is revealed which can then be observed under a scanning electron microscope.

Specimen preparation by focused ion beam technique

A novel raised polycide fusible link structure is described. This structure enables a highly reliable laser-cutting process to be used in which the fuse can be easily and totally severed over a wide range of laser energy levels. The primary feature of the structure is that the fusible link is located on a pedestal that raises it above the surface of the main body of the integrated circuit, thereby providing a measure of thermal isolation for the fuse when it is irradiated by the laser. An efficient process for manufacturing the structure is also described.

Raised fuse structure for laser repair

A digitizer whose sensing elements are made of magnetoresistive materials is designed for use with a computer system. The digitizer board includes a substrate made of dielectric material; a first array of strip-shaped magneto-resistors arranged on the front surface of the substrate; a second array of strip-shaped magneto-resistors arranged on the reverse surface of the substrate; a plurality of analog comparators coupled to the magneto-resistors; and a pen with a magnetic pinpoint used for pointing to a particular location on the front side of the digitizer board. The resistance of the magneto-resistors will vary due to a magnetic field emerging from the nearby pinpoint, and the magnetic-resistors will be effected, and subsequently the comparators connected to the magneto-resistors will send digital signals to the computer system.

Magneto-resistor digitizer

Growing community of inventors

Taipei, Taiwan

Ting Chou