Grundfos A/s

Tina Romedahl Brown

Niels D Jensen

Per Ellemose Andersen

Karsten Dyrbye

Ole Hart Lev Pedersen

The invention relates to a pressure or differential pressure sensor comprising a membrane with at least one measuring element located thereon, as well evaluation electronics for measuring the membrane deflection. The membrane is covered against environmental influences with a protective layer and is gripped within a mounting in a pressure tight manner. The protective layer is composed of a fluid tight amorphous metal layer, a so called metal glass layer which with the interposing of an electrically insulating layer, is directly deposited onto the membrane, the measuring element located thereon and where appropriate, onto further electronic components located thereon. In this manner, on the one hand, the membrane is protected but on the other hand it may be deflected sensitively since the amorphous metal layer is fluid and gas tight even with layer thicknesses in the .mu.m region.

Pressure sensor having an insulating layer and fluid tight amorphous

The invention relates to an electronic component manufactured in thick film technology, thin film technology or silicon technology and then provided with an electrically insulating layer which is covered by an amorphous metal layer. The amorphous metal layer protects the component, even with the smallest of layer thicknesses, from external influences and directly transmits heating and force effects.

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Bjerringbro, Denmark

Tina Romedahl Brown