International Business Machines Corporation

Timothy W Carr

Charles D Needham

Da-Yuan Shih

Paul H Palmateer

Warren D Grobman

Robert T Villetto, Jr

Derry J Dubetsky

Howard Arthur Froot

Walter F Lange

Carl P Hayunga

David W Boss

Edward C Spaulding

Amanda H Kumar

Edwin A Corl

John A Romano

Carl G Majtenyi

George M Greenstein

Robert H Massey

Sealing and stress relief are provided to a low-fracture strength glass-ceramic substrate. Hermeticity is addressed through the use of capture pads in alignment with vias and through polymer overlays with interconnection between the underlying via or pad metallurgy and the device, chip, wire or pin bonded to the surface of the layer. Multilevel structures are taught along with a self-aligned sealing and wiring process.

Sealing and stress relief layers and use thereof

Thin layer deposition process

Apparatus and a method for measuring trace amounts of oxygen in an atmosphere is described. An oxygen free nitrogen gas is used as the carrier gas and nitrogen, ultra high purity, with approximately 10 ppm (parts per million) water is used as the reagent gas of an ionization source is operated at atmospheric pressure. A small electric field of approximately 200 volts per centimeter is applied across the length of the ionization chamber up to a pinhole entrance to a quadrupole mass spectrometer. The voltage is biased to repel negative ions towards the quadrupole mass spectrometer. Measurement of the peak height of the m/e value of 52 in the mass spectrum are integrated over a period of time. The results of the integration are then compared to a calibration chart which indicates the amount of oxygen that is present in the atmosphere being measured.

Trace oxygen detector

A system for detecting and identifying the composition of a material, such as semiconductor wafers and chips, subject to one or more stages of processing. The material is laser irradiated to induce molecular fluorescence with means to detect the decay rate of the fluorescence. The decay rate is then compared with a decay record of fluorescence of acceptable modifications of the material, inclusive of amalgamated contaminants or impurities (e.g. doped regions) to determine the state of the modification of the material.

Microanalysis by pulse laser emission spectroscopy

A method for measuring trace amounts of water in an atmosphere. A dry inert gas is used as the carrier gas and a dry gas comprising about 20 percent oxygen and about 80 percent inert gas is used as the reagent gas. The ionization source is operated at atmospheric pressure. A small electric field of about 200 volts per centimeter is applied across the ion drift chamber and it is biased to repel negative ions to a quadrupole mass filter. Measurements at an m/e value of 52 are integrated over a period of time. The results of the integration, when compared to a calibration chart, indicate the amount of water that had been present in the atmosphere being measured.

Trace water measurement

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Poughkeepsie, NY, United States of America

Timothy W Carr