Texas Instruments Corporation

Trifact Solutions, Inc.

Timothy Vaughn

Thomas Johnston

Walter J Edmonds

This present invention for an in-line fluid heater suitable for heating ultrapure fluids utilizes a radiant energy source that generates infrared radiation to heat a fluid. The fluid to be heated is passed through a vessel such as a tube. The vessel, formed of PFA or polytetraflouroethylene, is coiled around the lamp or lamps. A chamber surrounds the lamp or lamps and the vessel. A temperature sensor at the outlet end of the vessel sends a signal to a controller that adjusts either the flow of fluid through the vessel or the intensity of the lamp or lamps, thereby controlling the fluid temperature at the outlet. The system is useful in any application requiring an ultraclean, non-contact method of raising the temperature of various liquids and gases.

Method device for heating fluids

A liner ( ) for an arc chamber ( ) of an ion implanter. The arc chamber ( ) comprises a liner ( ) on the inner surface ( ) of the arc chamber ( ) that extends the life of the arc chamber ( ). The liner ( ) comprises a one piece portion ( ) that covers the bottom and long sidewalls of the arc chamber ( ) and two end plates ( ) for covering the end walls of the arc chamber ( ). When the liner ( ) wears out it is replaced at a significantly reduced cost compared to replacing the entire arc chamber ( ).

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Lubbock, TX, United States of America

Timothy Vaughn