International Business Machines Corporation

Timothy L Holmes

Roger M Young

Darryl D Restaino

Eric Peter Solecky

Jonathan Levy

Christopher E Pepe

Susan M Cianfrani

William K Hoffman, Jr

A method for managing a metrology system includes receiving a part, identifying, with a processing device, a part type associated with the part, retrieving, with the processing device, test rule logic associated with the part type from a database, retrieving, with the processing device, measurement data associated with the identified part type, processing, with the processing device, the measurement data, applying, with the processing device, the test rule logic to the processed measurement data to determine whether the part should be measured, outputting the part responsive to determining that the part should not be measured, and incrementing, with the processing device, a counter and saving a value of the counter in the database responsive to outputting the part responsive to determining that the part should not be measured.

Metrology management

Automated tool recipe verification and correction are disclosed. A tool recipe is intercepted during uploading or downloading of the tool recipe. A determination whether an associated parameter verification set (PVS) template for the tool recipe exists is performed, and if it exists, a determination whether to verify the tool recipe is performed. Each parameters of the tool recipe having an auditable corresponding parameter is compared to the auditable corresponding parameter of the associated PVS template. Where no non-matching parameter sets exist, the tool recipe is verified; otherwise, a determination as to whether of all of the non-matching parameter sets are indicated as modifiable in the associated PVS template is made. If all of the parameters of the non-matching parameter sets are modifiable, then they are modified to match the respective auditable corresponding parameter and the tool recipe is verified, otherwise, the verification is inhibited.

Automated tool recipe verification and correction

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Newburgh, NY, United States of America

Timothy L Holmes