Xros, Inc.

Other

Hewlett-packard Company

Xeros, Inc.

Park Scientific Instruments

American International Technologies, Inc.

D.b.a. Adagio

Timothy G Slater

Armand P Neukermans

Marc R Schuman

Jack D Foster

Sam Calmes

James P Downing

Steven M Clark

Philip Downing

Rajiv R Ramaswami

Arun Malhotra

John M Green

Jane Ang

Sateesh S Bajikar

John S Forker

Gregory A Reznick

Sean S Cahill

Tyler L Baughman

Jerry Hurst

Ian R Smith

Michael D Kirk

Marco Tortonese

William R Higdon

Alan D Loux

Paul H Johnson

Linda E Whittlesey

A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.

Two-dimensional micro-mirror array enhancements

A fiber optic switch ( ) includes a fiber optic switching module ( ) that receives and fixes ends ( ) of optical fibers ( ). The module ( ) includes numerous reflective light beam deflectors ( ) which may be selected as pairs for coupling a beam of light ( ) between a pair of optical fibers ( ). The module ( ) also produces orientation signals from each deflector ( ) which indicate its orientation. A portcard ( ) included in the switch ( ) supplies drive signals to the module ( ) for orienting at least one deflector ( ). The portcard ( ) also receives the orientation signals produced by that deflector ( ) together with coordinates that specify an orientation for the deflector ( ). The portcard ( ) compares the received coordinates with the orientation signals received from the deflector ( ) and adjusts the drive signals supplied to the module ( ) to reduce any difference between the received coordinates and the orientation signals. The switch ( ) also employs optical alignment to precisely orient pairs deflectors ( ) coupling a beam of light ( ) between optical fibers ( ).

Flexible, modular, compact fiber optic switch

A fiber optic switch ( ) includes a fiber optic switching module ( ) that receives and fixes ends ( ) of optical fibers ( ). The module ( ) includes numerous reflective light beam deflectors ( ) arranged in a V-shape which may be selected as pairs for coupling a beam of light ( ) between a pair of optical fibers ( ). The module ( ) also produces orientation signals from each deflector ( ) which indicate its orientation. A portcard ( ) supplies drive signals to the module ( ) for orienting at least one deflector ( ). The portcard ( ) also receives the orientation signals produced by that deflector ( ) together with coordinates that specify an orientation for the deflector ( ). The portcard ( ) compares the received coordinates with the orientation signals and adjusts the drive signals supplied to the module ( ) to reduce any difference between the received coordinates and the orientation signals. The switch ( ) also employs optical alignment to precisely orient pairs deflectors ( ) coupling a beam of light ( ) between optical fibers ( ).

Flexible, modular, compact fiber switch improvements

A scanner, through which a document moves while being scanned by a moving beam of light, includes a wheel that rotates responsive to document movement. The wheel includes a multi-sectioned optical encoder upon which the scanning beam of light impinges when in a position at which it does not impinge upon the document. The scanner also includes an optical detector which receives light that is not absorbed by the optical encoder sections. Thus, the optical detector generates an electrical signal that indicates document movement speed. A preferred embodiment the scanner includes a pair of cup-shaped wheels one of which carries the optical encoder that encircles an inner surface of the wheel adjacent to a lip thereof. An axle, also included in the preferred embodiment, spans between, is coupled to, and supports the wheels for rotation in unison about a longitudinal axis parallel to the axle.

Scanner document speed encoder

A method for operating a monolithic, integrated, micromachined structure that includes a reference member and one or more dynamic members. Each dynamic member is supported from the reference member, either directly or indirectly, by torsion hinges. Supported in this way, each dynamic member exhibits a plurality of vibrational modes. Preferably, the structure is micromachined to establishes specified relationships between various pairs of vibrational modes. The method also includes applying force to each dynamic member that urges the member to rotate out of a rest position to a fixed particular angle.

Method of operating micromachined members coupled for relative rotation

A fiber optic switch includes a fiber optic switching module that receives and fixes ends of optical fibers. The module includes numerous reflective light beam deflectors which may be selected as pairs for coupling a beam of light between a pair of optical fibers. The module also produces orientation signals from each deflector which indicate its orientation. A portcard included in the switch supplies drive signals to the module for orienting at least one deflector. The portcard also receives the orientation signals produced by that deflector together with coordinates that specify an orientation for the deflector. The portcard compares the received coordinates with the orientation signals received from the deflector and adjusts the drive signals supplied to the module to reduce any difference between the received coordinates and the orientation signals. The switch also employs optical alignment to precisely orient pairs of deflectors coupling a beam of light between optical fibers.

A method for fabricating an integrated, micromachined structure, such as a torsional scanner, that includes a reference member, such as a frame, a pair of torsion hinges, and a dynamic member that is coupled to the reference member by the torsion hinges. The method includes providing a wafer that has been formed from silicon material, and that has both a frontside and a backside. A membrane is formed in the wafer by etching a cavity in the silicon material from the backside of the wafer. The method also includes establishing a pattern that defines the mirror surface and the torsion hinges on the frontside of the wafer at the membrane formed therein. The frontside of the wafer is processed to form therein the dynamic member and the torsion hinges that support the dynamic member for rotation about the axis.

Method for fabricating micromachined members coupled for relative rotation

A monolithically fabricated micromachined structure ( ) couples a reference frame ( ) to a dynamic plate ( ) or second frame for rotation of the plate ( ) or second frame with respect to the reference frame ( ). Performance of torsional oscillators or scanners ( ) benefits greatly by coupling the frame ( ) to the plate ( ) or second frame with torsional flexure hinges ( ) rather than torsion bars ( ). Appendages ( ), tethers ( ) or an improved drive circuit enhance electrostatic drive stability of torsional oscillators ( ). Wide and thin torsional flexure hinges ( ) and isotopically pure silicon enhance thermal conductivity between the plate ( ) and the frame ( ). Dampening material bridging slots ( ) adjacent to torsional flexure hinges ( ) drastically reduce the dynamic member's Q. A widened section ( ) of narrow torsional flexure hinges ( ) permit inclusion of a torsion sensor ( ). A dynamic member ( ) that includes an actuator portion ( ) performs light beam switching. Reflective coatings ( ), wire grid polarizers ( ), photo-detectors ( ) and Fresnel lenses ( ) enhance optical performance of the torsional scanners ( ).

Micromachined members coupled for relative rotation by hinges

A topographic head for profilometry and AFM supports a central paddle by coaxial torsion bars projecting inward from an outer frame. A tip projects from the paddle distal from the bars. The topographic head's frame, bars and paddle are monolithically fabricated by micromachining from a semiconductor wafer. The torsion bars preferably include an integrated paddle rotation sensor. The topographic head may be carried on an XYZ stage for X, Y and Z axis translation. In a preferred embodiment, the XYZ stage is also monolithically fabricated by micromachining from a semiconductor wafer with a fixed outer base that is coupled to an X-axis stage via a plurality of flexures, and with the X-axis stage supporting a Y-axis stage also via a plurality of flexures.

Integrated silicon profilometer and AFM head

A document transport for a scanner (,) has a flexible, elongated finger (,) disposed adjacent to a document (,), and a force applied to the finger (,) urges teeth (,) on the finger (,) into contact with the document (,) which urges the document (,) along a path through the scanner (,). A piezoelectric plate (,), which applies the force to the finger (,), requires only a small amount of electrical power. To traverse the scanner (,), a document (,) may also be manually fed along a guide (,). First and second speed-sensing detectors (,and,), disposed along the path traversed by the document (,), permit the scanner (,) to determine a speed at which the manually fed document (,) traverses the scanner (,). To conserve electrical energy, the scanner (,) also includes a document-presence detector (,) for activating the scanner (,) when a document (,) to be scanned is present.

Handheld document scanner

An actinic radiation source (,) includes an anode (,) upon which an electron beam from a cathode ray gun (,) impinges. The anode (,) includes a window area (,) formed by a silicon membrane. The electron beam upon striking the anode (,) permeates the window area (,) to penetrate into medium surrounding actinic radiation source (,). A method for making an anode (,) uses a substrate having both a thin first layer (,) and a thicker second layer (,) of single crystal silicon material between which is interposed a layer of etch stop material (,). The second layer (,) is anisotropically etched to the etch stop material (,) to define the electron beam window area (,) on the first layer (,). That portion of the etch stop layer (,) exposed by etching through, the second layer (,) is then removed. The anode (,) thus fabricated has a thin, monolithic, low-stress and defect-free silicon membrane electron beam window area (,) provided by the first layer of the substrate.

Actinic radiation source and uses therefor

An actinic radiation source (20) includes an anode (36) upon which an electron beam from a cathode ray gun (24) impinges. The anode (36) includes a window area (52) formed by a silicon membrane. The electron beam upon striking the anode (36) permeates the window area (52) to penetrate into medium surrounding actinic radiation source (20). A method for making an anode (36) uses a substrate having both a thin first layer (44) and a thicker second layer (46) of single crystal silicon material between which is interposed a layer of etch stop material (48). The second layer (46) is anisotropically etched to the etch stop material (48) to define the electron beam window area (52) on the first layer (44). That portion of the etch stop layer (48) exposed by etching through the second layer (46) is then removed. The anode (36) thus fabricated has a thin, monolithic, low-stress and defect-free silicon membrane electron beam window area (52) provided by the first layer of the substrate.

Actinic radiation source and uses thereofor

A beam (38) of electromagnetic radiation deflected by a moving mirror plate (56) of a micromachined scanner (54) produces a two dimensional ('2D') raster (132) on a scanned surface (28) of a block (34). The block (34) is transparent to electro-magnetic radiation of pre-established wavelengths. A radiation inlet-face (36) of the block (34) admits the beam (38) that then impinges on the scanned surface (28) to exit the block (34) through a radiation outlet-face (42). After exiting the block (34), the beam (38) impinges upon a radiation detector (142). Total internal reflection ('TIR') of the beam (38) from the scanned surface (28) at fingerprint valleys and frustration of TIR at fingerprint ridges causes the radiation detector (142) to produce a time-varying electrical signal that represents the fingerprint. The scanned surface (28) may be formed by a patch (302) of resilient material, that may be tinted to be transparent only at the pre-established wavelength of the electro-magnetic radiation.

Compact, simple, 2D raster, image-building fingerprint scanner

A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

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San Francisco, CA, United States of America

Timothy G Slater