Greene, Tweed of Delaware, Inc.

Greene, Tweed & Co.

Timothy Edwards

Christopher Corrado

Carmin Quartapella

George Rawa

Kenneth Murphy

William Keyser

A self contained sensing apparatus includes a housing establishing an interior compartment, the housing having a maximum thickness which is less than the size of a gate opening of a semiconductor wafer processing chamber for inserting the housing into the semiconductor wafer processing chamber for sensing a parameter. The housing includes a window extending through a principal housing surface. A sensor is provided within the housing and generally aligned with the window for sensing at least one parameter. A transmitter is provided within the housing and coupled with the sensor for receiving signals representative of the sensed parameter and transmitting the signals out of the housing.

Self contained sensing apparatus and system

A self contained sensing apparatus includes a housing establishing an interior compartment, the housing having a maximum thickness which is less than the size of an access portal for inserting the housing into an area for sensing. The housing includes a window extending through a principal housing surface. A sensor is provided within the housing and generally aligned with the window for sensing at least one parameter. In a preferred embodiment, the sensor is an optical sensor for sensing images through the window. A transmitter is provided within the housing and coupled with the sensor for receiving signals representative of the sensed parameter and transmitting the signals out of the housing.

A clamp ring assembly for securing a generally circular workpiece to a supporting surface comprises an annular base ring having a radial inner surface of a predetermined diameter and at least one locking member. The base ring further includes at least one opening extending axially therethrough for securing the base ring to the supporting surface. An annular securing ring having a radial outer surface and a radial inner surface is provided. The diameter of the outer surface of the securing ring is the same as or slightly smaller than the diameter of the inner surface of the base ring and the securing ring includes at least one locking member for engaging the locking member of the base ring when the securing ring is assembled with the base ring. The securing ring also includes at least one workpiece engaging member for engaging and holding the workpiece against the supporting surface.

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Harleysville, PA, United States of America

Timothy Edwards