Air Products and Chemicals, Inc.

Versum Materials Us, LLC

Timothy Edward Conway

Vladimir Yliy Gershtein

Jeffrey Alan Hopkins

Thomas M Booth

Brian M Lindenmuth

Rakesh Agrawal

Zbigniew Tadeusz Fidkowski

John Frederick Cirucci

An onsite purification plant/system to delivery high and ultra high purity product, such as, process chemicals, industrial and specialty gases to manufacturing processes within the onsite plant turndown ratio from 0% to 100% while preserving the predetermined purity of the supplied substances within a predefined specification range is provided. Preserving liquid/vapor ratio in at least one of the purification means/units ensuring that product purity range stays unchanged is achieved by redirecting the product back into the onsite purification plant/system.

Onsite ultra high purity chemicals or gas purification

The process removes from a diluted gas one or more fluorine compounds present at a first concentration in the diluted gas and concentrates the fluorine compounds. This is done by directly contacting the diluted gas with a cryogenic liquid having a temperature less than or equal to about &minus;150&deg; F., thereby producing a vapor lean in the fluorine compounds and liquid enriched with the fluorine compounds at a second concentration. The second concentration is greater than the first concentration.

Process for concentrating fluorine compounds

Growing community of inventors

Allentown, PA, United States of America

Timothy Edward Conway